Observation of Lattice Undulation of Commercial Bonded Silicon-On-Insulator Wafers by Synchrotron X-Ray Topography : Structure and Mechanical and Thermal Properties of Condensed Matter
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-11-15
著者
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FUKUDA Kazunori
Department of Oriental Medicine, Gifu University School of Medicine
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YASUTAKE Kiyoshi
Department of Precision Engineering, Faculty of Engineering, Osaka University
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UMENO Masataka
Department of Precision Engineering, Faculty of Engineering, Osaka University
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Yasutake Kiyoshi
Graduate School Of Engineering Osaka University
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Yasutake K
Department Of Material And Life Science Graduate School Of Engineering Osaka University
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Yasutake Kiyoshi
Department Of Material And Life Science Graduate School Of Engineering Osaka University
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SHIMURA Takayoshi
Department of Material and Life Science, Graduate School of Engineering, Osaka University
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Umeno Masataka
Department Of Management And Information Science Faculty Of Engineering Fukui University Of Technolo
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Umeno Masataka
Department Of Applied Physics Faculty Of Engineering Osaka University
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Fukuda Kazunori
Department Of Material And Life Science Graduate School Of Engineering Osaka University
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Yoshida Takayoshi
Department Of Material And Life Science Graduate School Of Engineering Osaka University
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Yoshida Takayoshi
Department Of Health And Sport Sciences Graduate School Of Medicine Osaka University
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Shimura Takayoshi
Department Of Material And Life Science Graduate School Of Engineering Osaka University
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Yoshida Takayoshi
Department Of Heaith And Sports Sciences Osaka University
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