Charge Neutralization Using Focused 500eV Electron Beam in Focused Ion Beam System

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概要

• 論文の詳細を見る
• Japan Society of Applied Physicsの論文
• 2005-05-10

著者

• Yasutake Kiyoshi

  Department Of Precision Science And Technology Graduate School Of Engineering Osaka University

• Yasutake Kiyoshi

  Department Of Material And Life Science Graduate School Of Engineering Osaka University

• Watanabe Heiji

  Department Of Precision Science And Technology Graduate School Of Engineering Osaka University

• Yamamoto Yoh

  Engineering Department R&d Department Sii Nano Technology Inc.

• Watanabe Heiji

  Department Of Material And Life Science Graduate School Of Engineering Osaka University

• KOMODA Hirotaka

  Electronic Devices Company, Ricoh Co., Ltd.

• YOSHIDA Masaaki

  Electronic Devices Company, Ricoh Co., Ltd.

• IWASAKI Kouji

  Engineering Department R&D Department, SII Nano Technology Inc.

• Iwasaki Kouji

  Engineering Department R&d Department Sii Nano Technology Inc.

• Komoda Hirotaka

  Electronic Devices Company Ricoh Co. Ltd.

• Yoshida Masaaki

  Electronic Devices Company Ricoh Co. Ltd.

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