Detection of Open Contact Using Optical-Beam-Induced Current Techniques

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概要

• 論文の詳細を見る

• Optical-beam-induced current (OBIC) techniques have been reported as very useful failure analysis tools for detecting leakage sites and latch-up sensitivity. In this study, this OBIC technique was successfully applied to detect an open contact site. Focused ion beam (FIB) cross-sectioning and observation of the open contact revealed the cause of open failure. This OBIC technique was proven to be very rapid and convenient, because no special sample preparation is necessary.

• 社団法人応用物理学会の論文
• 1994-08-01

著者

• Komoda Hirotaka

  Electronic Devices Division Ricoh Company Ltd.

• Komoda Hirotaka

  Electronic Devices Company Ricoh Co. Ltd.

• Shimizu Katsusuke

  Electronic Devices Division Ricoh Company Ltd.

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