Synchrotron X-Ray Topography of Lattice Undulation of Bonded Silicon-On-Insulator Wafers

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-03-15

著者

• FUKUDA Kazunori

  Department of Oriental Medicine, Gifu University School of Medicine

• YASUTAKE Kiyoshi

  Department of Precision Engineering, Faculty of Engineering, Osaka University

• UMENO Masataka

  Department of Precision Engineering, Faculty of Engineering, Osaka University

• Yasutake Kiyoshi

  Graduate School Of Engineering Osaka University

• SHIMURA Takayoshi

  Department of Material and Life Science, Graduate School of Engineering, Osaka University

• Yoshida Takayoshi

  Department Of Material And Life Science Graduate School Of Engineering Osaka University

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