Direct Conversion of Metal Acetylacetonates and Metal Organic Acid Salts into Metal Oxides Thin Films Using Coating Photolysis Process with An ArF Excimer Laser
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-10-01
著者
-
土屋 敏章
島根大学 総合理工学部
-
MANABE Takaaki
National Institute of Advanced Industrial Science and Technology
-
KUMAGAI Toshiya
National Institute of Advanced Industrial Science and Technology
-
TSUCHIYA Tetsuo
National Institute of Advanced Industrial Science and Technology
-
YAMAGUCHI Iwao
National Institute of Advanced Industrial Science and Technology (AIST)
-
MIZUTA Susumu
National Institute of Advance Industrial Science and Technology (AIST)
-
WATANABE Akio
National Institute of Materials and Chemical Research
-
IMAI Yoji
National Institute of Materials and Chemical Research
-
NIINO Hiroyuki
National Institute of Materials and Chemical Research
-
Kumagai T
Advanced Manufacturing Research Institute National Institute Of Advanced Industrial Science And Tech
-
Mizuta S
National Institute Of Advanced Industrial Science And Technology (aist)
-
Tsuchiya T
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
-
Watanabe Akio
Ntional Institute Of Advanced Industrial Science And Technology
-
Tsuchiya T
Department Of Electronics Doshisha University
-
Niino H
National Inst. Advanced Industrial Sci. And Technol. Aist Ibaraki Jpn
-
Niino H
Photonics Research Institute National Institute Of Advanced Industrial Science And Technology (aist)
-
Niino Hiroyuki
National Institute For Materials And Chemical Research
-
Tsuchiya Tetsuo
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
-
Kumagai Toshiya
National Inst. Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
-
Watanabe Akiko
The Institute For Solid State Physics The University Of Tokyo
-
Imai Y
Ntional Institute Of Advanced Industrial Science And Technology
-
Watanabe A
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
-
Niino Hiroyuki
National Chemical Laboratory For Industry
-
Mizuta Satoru
National Institute Of Advanced Industrial Science And Technology (aist)
-
Manabe Takaaki
National Institute Of Advanced Industrial Science And Technology (aist)
-
Yamaguchi I
National Institute Of Advanced Industrial Science And Technology (aist)
-
Watanabe Akio
National Institute For Research In Inorganic Materials
-
Watanabe Akiyoshi
College Of General Education Tohoku University
-
Mizuta Susumu
National Institute of Advanced Industrial Science and Technology (AIST)
-
KUMAGAI Toshiya
Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology
-
Manabe Takaaki
National Institute of Advance Industrial Science and Technology (AIST)
-
Kumagai Toshiya
National Chemical Laboratory for Industry
-
Mizuta Susumu
National Chemical Laboratory for Industry
関連論文
- ナノスケールMOSデバイスにおける界面物性の揺らぎ : 界面トラップ1個1個を検出して評価する
- Synthesis and Surface Acoustic Wave Property of Aluminum Nitride Thin Films Fabricated on Silicon and Diamond Substrates Using the Sputtering Method : Surfaces, Interfaces, and Films
- Preparation of polycrystalline VO2 films on glass and TiO2/glass substrates by means of excimer laser assisted metal organic deposition
- SOI基板材料の品質評価と技術課題
- Preparation and characterization of epitaxial VO2 films on sapphire using postepitaxial topotaxy route via epitaxial V2O3 films
- Epitaxial growth of La_Ba_MnO_3 thin films on SrTiO_3 and LaAlO_3 substrates by metal-organic deposition process
- Preparation of Double-Sided YBCO Films on LaAlO_3 by MOD Using Commercially Available Coating Solution( Superconducting High-frequency Devices)
- Fabrication of Double-Sided YBa_2Cu_3O_7 Films on CeO_2-Buffered Sapphire Substrates by MOD Process( Superconducting High-frequency Devices)
- Electrical Properties of La_Ca_MnO_3 Thin Films Obtained by Metal-Organic Deposition (MOD) using Excimer Laser and Thermal Annealing
- Preparation of High-J_c YBa_2 Cu_3O_ Films on CeO_2-Buffered Yttria-Stabilized Zirconia Substrates by Fluorine-Free Metalorganic Deposition
- Large Temperature Coefficient of Resistance in La_Ca_MnO_3 Thin Films Obtained by Metal Organic Deposition Process
- Low Temperature Growth of Epitaxial La_Sr_MnO_3 Thin Films by an Excimer-Laser-Assisted Coating Pyrolysis Process
- Preparation of Epitaxial YBa_2Cu_3O_/CeO_2 Multilayer Films on Yttria-stabilized Zirconia (100) by All-Coating-Pyrolysis Process : Superconductors
- Preparation of PbTiO_3 Thin Films Using a Coating Photolysis Process with ArF Excimer Laser
- X-Ray Diffraction Studies of Epitaxial La_Sr_CoO_3 Thin Films Prepared by the Dipping-Pyrolysis Process
- Direct Conversion of Metal Acetylacetonates and Metal Organic Acid Salts into Metal Oxides Thin Films Using Coating Photolysis Process with An ArF Excimer Laser
- Direct Conversion of Titanium Alkoxide into Crystallized TiO_2 (rutile) Using Coating Photolysis Process with ArF Excimer Laser
- Epitaxial Growth of Bi_4Ti_3O_ Thin Films on LaAlO_3 (012) and MgO (100) by Dipping-Pyrolysis Process
- Preparation of Epitaxial Pb(Zr, Ti)O_3 Thin Films on Nb-Doped SrTiO_3(100) Substrates by Dipping-Pyrolysis Process
- Effective-Time of Pulsed Photothermal Heating for Polycrystalline Nucleation of Perovskite Oxide Films from an Amorphous Matrix
- Low-temperature fabrication of red phosphor Ca0.997Pr0.002TiO3 thin film using excimer laser assisted metal organic deposition
- Critical Current Densities at 77 K in Ba_2YCu_3O_-Ag Films Prepared by Dipping-Pyrolysis Process
- Preparation and Superconducting Properties of Bi-Pb-Sr-Ca-Cu-O Films (T_c=106 K) by the Dipping-Pyrolysis Process
- Preparation of High-J_c Ba_2YCu_3O_ Films on SrTiO_3 (100) Substrates by the Dipping-Pyrolysis Process at 750℃
- Preparation of Superconducting Ba_2YCu_3O_/Ag Composite Films by the Dipping-Pyrolysis Process Using Metal Naphthenates at 750℃
- SiGe/SiヘテロチャネルMOSFETにおける過渡チャージポンピング特性
- SiGe/SiヘテロMOSFETにおけるヘテロ界面のホットキャリア局所劣化
- SiGe/SiヘテロMOSFETにおけるホットキャリアによるヘテロ界面準位の発生
- BドープSiGe選択CVD成長により形成された極浅ソース・ドレインと高Ge比率歪SiGeヘテロチャネルを有する高性能pMOSFET
- Low-Frequency Noise in Si_Ge_x p-Channel Metal Oxide Semiconductor Field-Effect Transistors : Semiconductors
- Si_Ge_xチャネルpMOSFETにおける低周波雑音とSi_Ge_x/Siヘテロ構造品質との対応
- Si_Ge_xチャネルpMOSFETにおける低周波雑音とSi_Ge_x/ヘテロ構造品質との対応
- Si_Ge_xチャネルpMOSFETにおける低周波雑音とSi_Ge_x/ヘテロ構造品質との対応
- Excimer Laser Ablation and Morphology of Uniaxially Stretched Poly(ethylene-2, 6-naphthalate) Films
- シリコン量子井戸構造の作製と評価
- シリコン量子井戸構造の作製と評価
- シリコン量子井戸構造の作製と評価
- 低温多結晶シリコンTFTのデバイス特性や信頼性に及ぼす粒界の影響(有機EL, TFT,及び一般)
- 低温多結晶シリコンTFTのデバイス特性や信頼性に及ぼす粒界の影響(有機EL, TFT,及び一般)
- 低温多結晶シリコンTFTのデバイス特性や信頼性に及ぼす粒界の影響(有機EL, TFT,及び一般)
- SOI CMOSデバイス
- SOI CMOSの現状と展望
- SOI CMOSの現状と展望
- SOI CMOSの現状と展望
- Optical Gain and Optical Internal Loss of GaN-Based Laser Diodes Measured by Variable Stripe Length Method with Laser Processing : Optics and Quantum Electronics
- Effect of Intentionally Formed 'V-Defects' on the Emission Efficiency of GaInN Single Quantum Well
- GaN-Based Laser Diodes Processed by Annealing with Minority-Carrier Injection
- Correlation between Dislocation Density and the Macroscopic Properties of GaN Grown by Metalorganic Vapor Phase Epitaxy
- Room-Temperature Pulsed Operation of GaN-Based Laser Diodes on a-Face Sapphire Substrate Grown by Low-Pressure Metalorganic Chemical Vapor Deposition
- Characterization of a Non-Superconducting Cuprate, Bi_2Sr_2YCu_2O_ : Electrical Properties of Condensed Matter
- Structures and Upper Critical Fields of High T_c Superconductors (RE)Ba_2Cu_3O_x
- PbSnCaTe Films and PbSnCaTe/PbSnTe Superlattices Prepared by Molecular Beam Epitaxy(Semiconductors)
- PbCaTe Films and PbCaTe/PbTe Superlattices Prepared by Hot-Wall Epitaxy
- Molecular Oriented Thin Film of Biphenyl-4,4'-dithiol Fabricated by Molecular Beam Deposition Method
- Crystal Sructure of Zirconium Oxide Deposited as Thin Films from Zr-acetylacetonate and Zr-ter-butoxide by Laser Chemical Vapor Deposition Technique
- Crystal Structures of the TiO_2 Films on the Quartz Substrate and the Powder formed in the Gaseous Phase by ArF Laser Photolysis of Ti(O-i-C_3H_7)_4
- Epitaxial growth of La0.7Ba0.3MnO3 thin films on SrTiO3 and LaAlO3 substrates by metal-organic deposition (Special issue: Solid state devices and materials)
- バイアス・温度(BT)処理を用いたnMOSFET/SIMOXの特性改善
- Effects of Annealing Conditions and Substrate Materials on the Superconducting Properties of Ba_2YCu_3O_ Films Prepared by the Dipping-Pyrolysis Process at 750℃
- Preparation of Superconducting Ba_2YCu_3O_ Films by the Dipping-Pyrolysis Process at 700° and 750℃
- Effects of Heat Treatment Conditions on the Critical Current Densities of Ba_2YCu_3O_ Films Prepared by the Dipping-Pyrolysis Process
- Microfabrication of a Fluoropolymer Film Using Conventional XeCl Excimer Laser by Laser-Induced Backside Wet Etching
- Laser Ablation of Poly(methylmethacrylate) Doped with Aromatic Compounds : Laser Intensity Dependence of Absorption Coefficient
- Formation of Elastic Cone-Like Microstructures on the Composite of Elastomer and Carbon Black by Excimer Laser Ablation
- Molecular Orientation of Liquid Crystalline Polymer Films Fabricated by Polarized-Laser Chemical Vapor Deposition
- Anisotropic Molecular Orientation of Poly(o-trimethylsilyl)-Phenylacetylene Film Swollen under High Magnetic Field
- High-resolution Observation of SrTiO_3 Interface by Convergent Beam Illumination
- Properties and Degradation of Polarization Reversal of Soft BaTiO_3 Ceramics for Ferroelectric Thin-Film Devices
- Influence of Doping Gradient near a Channel End on Parasitic Series Resistance of Thin-Film Fully-Depleted Metal-Oxide-Semiconductor Field-Effect Transistors
- Body-Charge-Induced Switching Characteristics in Fully Depleted Silicon-on-Insulator Digital Circuits
- Improving the Characteristics of Ultra-Thin-Film Fully-Depleted Metal-Oxide-Semiconductor Field Effect Transistors on SIMOX (Separation by IMplanted OXygen) by Selective Tungsten Deposition on Source and Drain Region
- 300-kilo-Gate Sea-of-Gate Type Gate Arrays Fabricated Using 0.25-μm-Gate Ultra-Thin-Film Fully-Depleted Complementary Metal-Oxide-Semiconductor Separation by IMplanted OXygen (CMOS/SIMOX) Technology with Tungsten-Covered Source and Drain
- Numerical Analysis of Underwater Acoustic Lens Using Wide-Angle Parabolic Equation Method
- Spatially Selective Formation of Microcrystalline Germanium by Laser-Induced Pyrolysis of Organogermanium Nanocluster Film
- Nanocrystalline Silicon Flim Prepared by Laser Annealing of Organosilicon Nanocluster : Semiconductors
- Preparation and Characterization of Ferroelectric BaTi_(Hf_ Zr_)_O_3 Thin Films by Sol-Gel Process Using Titanium and Zirconium Alkoxides
- Application of Excimer Laser Polymer Ablation to Alignment of Liquid Crystals: Periodic Microstructure on Polyethersulfone
- Effect of Ion Implantations and Post-treatments on Optical Transmission of Fluorozirconate Glass
- Polarization Properties in Phase Conjugation with Bacteriorhodopsin
- Optical Characterization of Ion-Implanted Glass Surface Layers with Surface Plasmon Resonance Method
- Fusion of Paramecia by Means of Altered Electrofusion
- Search for Objects on the Deep-Sea Floor Using Side Scan Sonar with a Tilted Arrangement Transducer Array
- Sea Trial Results of a Cross Fan Beam Type Sub-Bottom Profiler
- Evaluation of the Performance of Deep Sea Survey Sonars from the Results of Search for a Sunken Ship
- Emission Characteristics of Internally Self-Pumped Phase-Conjugate Wave in Photorefractive KNbO_3:Fe and BaTiO_3 Crystals
- Wide-Angle Parabolic Equation Solution of Ocean Acoustic Propagation with Lossy Penetrable Bottom
- Numerical Analysis of Acoustical Propagation in Ocean with Warm and Could Water Mass Used by The Three-Dimensional Wide-Angle Parabolic Equation Method
- Three-Dimensional Ray Simulation of Sound Propagation in Ocean with a Geostrophic Current
- Estimation of Receiving Waveform of Ultrasonic Aerial Back Sonar Calculated by Finite Difference Time Domain Method (Short Note)
- Numerical Analysis of Acoustical Propagation Characteristics in Central Equatorial Pacific Ocean with Ridges of Seabed Used by Three-Dimensional Parabolic Equation Method
- Adjustment of thermal hysteresis in epitaxial VO2 films by doping metal ions
- A Laser Ionization Time-of-Flight Mass Spectrometric Study of UV Laser Ablation of Plyarylsulfone Films
- Preparation of YBa2Cu3O7-δ Micropatterns Using Metal–Organic Deposition with Electron Beam
- Basic Study of Properties of Planate Acoustic Lens Constructed with Phononic Crystal Structure (Special Issue : Ultrasonic Electronics)
- Epitaxial Growth of La0.7Ba0.3MnO3 Thin Films on SrTiO3 and LaAlO3 Substrates by Metal-Organic Deposition
- Electrical Properties of La0.7Ca0.3MnO3 Thin Films Obtained by Metal-Organic Deposition (MOD) using Excimer Laser and Thermal Annealing
- Preparation and Characterization of Epitaxial VO2 Films on Sapphire Using Postepitaxial Topotaxy Route via Epitaxial V2O3 Films
- Transmission electron microscopy study on the effects of the ultrasound contrast agent Levovist on hepatic cells
- Preparation of High-$J_{\text{c}}$ YBa2Cu3O7-y Films on CeO2-Buffered Yttria-Stabilized Zirconia Substrates by Fluorine-Free Metalorganic Deposition
- Kinetics of the catalytic decomposition of hydrogen iodide in the magnesium-iodine thermochemical cycle.