Microfabrication of a Fluoropolymer Film Using Conventional XeCl Excimer Laser by Laser-Induced Backside Wet Etching
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-07-01
著者
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YABE Akira
National Institute of Advanced Industrial Science and Technology (AIST)
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NIINO Hiroyuki
National Institute of Materials and Chemical Research
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Wang Jun
National Institute Of Materials And Chemical Research
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Yabe A
National Inst. Advanced Industrial Sci. And Technol. Aist Ibaraki Jpn
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Yabe Akira
Department Of Chemistry University Of Tsukuba
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Niino H
National Inst. Advanced Industrial Sci. And Technol. Aist Ibaraki Jpn
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Niino Hiroyuki
National Institute For Materials And Chemical Research
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Yabe A
National Institute Of Advanced Industrial Science And Technology (aist)
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Yabe Akira
National Chemical Laboratory For Industry
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Yabe Akira
Mechanical Engineering Laboratory Aist Miti
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Niino Hiroyuki
National Chemical Laboratory For Industry
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