A16-085 MICRO FABRICATION AND DRILLING USING DIFFRACTION-FREE PULSED LASER BEAM
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概要
- 論文の詳細を見る
A laser micro-fabrication using a diffraction-free beam (Bessel beam) was performed. A micro-fabrication with a long work distance is possible, because the diffraction-free beam has a main lobe with a small diameter, which does not depend on the propagation length. The diffraction-free beam was generated using an axicon lens, and the generation was confirmed by the optical microscope image of a laser-fabricated spot on the silicon wafer. Nevertheless using nano-second pulsed Nd : YAG laser, the micro-fabrication with a diameter of spot < 1μm was achieved. In addition, even if we change the work distance within the range of several mm, it was able to maintain the diameter of the laser fabricated spots around 1μm. A laser drilling in a SUS304 foil (20μm thickness) was also performed and penetration hole with a laser diameter of 3μm (aspect ratio in about 7) was drilled.
- 一般社団法人日本機械学会の論文
- 2003-11-30
著者
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Yabe Akira
National Institute Of Advanced Industrial Science And Technology (aist) Research Center For Advanced
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Yabe Akira
National Chemical Laboratory For Industry
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Matsuoka Yoshihiko
National Institute Of Advanced Industrial Science And Technology (aist) Research Center For Advanced
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Matsuoka Yoshihiko
National Institute Of Advanced Industrial Science And Technology (aist) Advanced Manufacturing Resea
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KOHNO Masamichi
National Institute of Advanced Industrial Science and Technology (AIST) Research Center for Advanced
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TANAKA Yasuto
Institute of Systems and Information Engineering, University of Tsukuba
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Tanaka Yasuto
Institute Of Systems And Information Engineering University Of Tsukuba
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Kohno Masamichi
National Institute Of Advanced Industrial Science And Technology (aist) Research Center For Advanced
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Kohno Masamichi
National Institute Of Advanced Industrial Science And Technology (aist)
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