Microfabrication and Drilling Using Diffraction-Free Pulsed Laser Beam Generated with Axicon Lens(<Special Issue>Micro Mechanical Engineering)

概要

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Laser microfabrication using a diffraction-free beam (Bessel beam) was performed. Microfabrication with a deep focal depth is possible because a diffraction-free beam has a main lobe with a small diameter, which does not depend on propagation length. The diffraction-free beam was generated using an axicon lens, and the generation was confirmed using an optical microscopy image of a laser-fabricated spot on a silicon wafer. Nevertheless using a nanosecond pulsed Nd:YAG laser, microfabrication with a spot diameter < 1μm was realized. As a result of the deep focal depth of the diffraction-free beam, even if we change the work distance within a range of several millimeters, we are still able to maintain the diameter of the laser- fabricated spots to approximately 1μm. Since an almost straight penetration hole with a diameter of 3μm was drilled into SUS304 foil (20μm thick), it was found that the diffraction-free beam has a high feasibility for the high-aspect-ratio laser drilling of an opaque material due to its deep focal depth.
一般社団法人日本機械学会の論文
2004-08-15