ナノスケールMOSデバイスにおける界面物性の揺らぎ : 界面トラップ1個1個を検出して評価する
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概要
- 論文の詳細を見る
- 2009-09-10
著者
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土屋 敏章
島根大学 総合理工学部
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Tsuchiya T
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
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Tsuchiya T
Department Of Electronics Doshisha University
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Tsuchiya Toshiharu
Faculty Of Engineering Shizuoka University
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Tsuchiya Takenobu
Department Of Electrical Electronics And Information Engineering Kanagawa University
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