SOI CMOSの現状と展望
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概要
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SOI(Silicon on Insulator)CMOSの本格的な導入を可能にした, LSIの動向や技術的な背景について述べ, SOI CMOSの特徴, 及び, それがLSIの低消費電力化と高速化に有効であることを, LSIへの応用例を交えてまとめた. また, SOI CMOSの今後の展望として, スケーリングに伴って顕在化する寄生効果とそれを抑制するためのデバイス構造のあり方, 今後の更なる低電源電圧化トレンドの中で, 性能向上を図るための考え方及び必要と考えられる技術について述べた.
- 社団法人電子情報通信学会の論文
- 1999-04-25
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