Crystal Sructure of Zirconium Oxide Deposited as Thin Films from Zr-acetylacetonate and Zr-ter-butoxide by Laser Chemical Vapor Deposition Technique
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-06-01
著者
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土屋 敏章
島根大学 総合理工学部
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TSUCHIYA Tetsuo
National Institute of Advanced Industrial Science and Technology
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WATANABE Akio
National Institute of Materials and Chemical Research
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IMAI Yoji
National Institute of Materials and Chemical Research
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Tsuchiya T
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
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Watanabe Akio
Ntional Institute Of Advanced Industrial Science And Technology
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Tsuchiya T
Department Of Electronics Doshisha University
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Tsuchiya Tetsuo
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
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TSUCHIYA Tetsuo
Ntional Institute of Advanced Industrial Science and Technology
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IMAI Yoji
Ntional Institute of Advanced Industrial Science and Technology
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Tsuchiya Toshiharu
Faculty Of Engineering Shizuoka University
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Watanabe Akiko
The Institute For Solid State Physics The University Of Tokyo
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Imai Y
Ntional Institute Of Advanced Industrial Science And Technology
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Watanabe A
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
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Watanabe Akio
National Institute For Research In Inorganic Materials
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