Threading Dislocation Reduction in InP on GaAs by Thin Strained Interlayer and its Application to the Fabrication of 1.3-μm-Wavelength Laser on GaAs

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-01-30

著者

• Kitano T

  Tokyo Electron Kyushu Ltd. Kumamoto Jpn

• Tsuchiya T

  Department Of Electronics Doshisha University

• Kawano T

  Osaka Univ. Osaka Jpn

• TSUCHIYA Tomonobu

  Central Research Laboratory, Hitachi, Ltd.

• Kawano T

  Tokyo Electron Kyushu Ltd. Kumamoto Jpn

• Kitano T

  Fundamental Research Laboratories Nec Corporation

• Tsuchiya Tomonobu

  Central Research Laboratory Hitachi Ltd

• Okuno Y

  Lsi Manufacturing Technology Unit Wafer Process Engineering Development Division Renesas Technology

• TANIWATARI Tsuyoshi

  Central Research Laboratory, Hitachi Ltd.

• KAWANO Toshihiro

  Central Research Laboratory, Hitachi Ltd.

• OKUNO Yae

  Central Research Laboratory, Hitachi Ltd.,

• Okuno Y

  Central Research Laboratory Hitachi Ltd.

• Okuno Yae

  Central Research Laboratory Hitachi Ltd.

• Kawano Toshihiro

  Central Research Laboratory Hitachi Ltd.

• Taniwatari T

  Hitachi Ltd. Tokyo

• Taniwatari Tsuyoshi

  Central Research Laboratory Hitachi Ltd.

関連論文

• ナノスケールMOSデバイスにおける界面物性の揺らぎ : 界面トラップ1個1個を検出して評価する
• Epitaxial growth of La_Ba_MnO_3 thin films on SrTiO_3 and LaAlO_3 substrates by metal-organic deposition process
• Large Temperature Coefficient of Resistance in La_Ca_MnO_3 Thin Films Obtained by Metal Organic Deposition Process
• Low Temperature Growth of Epitaxial La_Sr_MnO_3 Thin Films by an Excimer-Laser-Assisted Coating Pyrolysis Process
• Preparation of Epitaxial YBa_2Cu_3O_/CeO_2 Multilayer Films on Yttria-stabilized Zirconia (100) by All-Coating-Pyrolysis Process : Superconductors
• Preparation of PbTiO_3 Thin Films Using a Coating Photolysis Process with ArF Excimer Laser
• Direct Conversion of Metal Acetylacetonates and Metal Organic Acid Salts into Metal Oxides Thin Films Using Coating Photolysis Process with An ArF Excimer Laser
• Direct Conversion of Titanium Alkoxide into Crystallized TiO_2 (rutile) Using Coating Photolysis Process with ArF Excimer Laser
• Effective-Time of Pulsed Photothermal Heating for Polycrystalline Nucleation of Perovskite Oxide Films from an Amorphous Matrix
• Critical Current Densities at 77 K in Ba_2YCu_3O_-Ag Films Prepared by Dipping-Pyrolysis Process
• Preparation and Superconducting Properties of Bi-Pb-Sr-Ca-Cu-O Films (T_c=106 K) by the Dipping-Pyrolysis Process
• Preparation of Superconducting Ba_2YCu_3O_/Ag Composite Films by the Dipping-Pyrolysis Process Using Metal Naphthenates at 750℃
• SiGe/SiヘテロチャネルMOSFETにおける過渡チャージポンピング特性
• SiGe/SiヘテロMOSFETにおけるヘテロ界面のホットキャリア局所劣化
• SiGe/SiヘテロMOSFETにおけるホットキャリアによるヘテロ界面準位の発生
• BドープSiGe選択CVD成長により形成された極浅ソース・ドレインと高Ge比率歪SiGeヘテロチャネルを有する高性能pMOSFET
• Low-Frequency Noise in Si_Ge_x p-Channel Metal Oxide Semiconductor Field-Effect Transistors : Semiconductors
• Si_Ge_xチャネルpMOSFETにおける低周波雑音とSi_Ge_x/Siヘテロ構造品質との対応
• Si_Ge_xチャネルpMOSFETにおける低周波雑音とSi_Ge_x/ヘテロ構造品質との対応
• Si_Ge_xチャネルpMOSFETにおける低周波雑音とSi_Ge_x/ヘテロ構造品質との対応
• シリコン量子井戸構造の作製と評価
• シリコン量子井戸構造の作製と評価
• 低温多結晶シリコンTFTのデバイス特性や信頼性に及ぼす粒界の影響(有機EL, TFT,及び一般)
• 低温多結晶シリコンTFTのデバイス特性や信頼性に及ぼす粒界の影響(有機EL, TFT,及び一般)
• 低温多結晶シリコンTFTのデバイス特性や信頼性に及ぼす粒界の影響(有機EL, TFT,及び一般)
• SOI CMOSデバイス
• SOI CMOSの現状と展望
• SOI CMOSの現状と展望
• SOI CMOSの現状と展望
• Widely Tunable Integrated DBR Laser Array with Fast Wavelength Switching
• PbSnCaTe Films and PbSnCaTe/PbSnTe Superlattices Prepared by Molecular Beam Epitaxy(Semiconductors)
• PbCaTe Films and PbCaTe/PbTe Superlattices Prepared by Hot-Wall Epitaxy
• Pressure Effect of Sound Speed in the Deep Ocean
• Measurements of Absorption Coefficients in the Deep-Sea Area
• Relationship between Acoustic Bandwidth and Characteristics of Sound Propagation in West Mediterranean Sea
• Lower Lamb Wave Resonance Mode of Thin Cylindrical Shells
• Time-Domain Analysis of SOFAR Propagation in Low-Latitude Sea Area by Wave Theory and Ray Theory
• Radication Power Output for Two-Dimensional Array of Transducers in Water Using Farfield and Nearfield Techniques
• Effect of Thin Cylindrical Shell Vibration on Resonant Frequency of Cylindrical Resonator-Type Sound Source
• 霧化型励起酸素発生器の基礎研究
• Defects in Ion-Implanted 3C-SiC Probed by a Monoenergetic Positron Beam
• Oxygen Microclusters in Czochralski-Grown Si Probed by Positron Annihilation
• Crystal Sructure of Zirconium Oxide Deposited as Thin Films from Zr-acetylacetonate and Zr-ter-butoxide by Laser Chemical Vapor Deposition Technique
• Crystal Structures of the TiO_2 Films on the Quartz Substrate and the Powder formed in the Gaseous Phase by ArF Laser Photolysis of Ti(O-i-C_3H_7)_4
• Synchrotron Plane Wave X-Ray Topography of 6 inch Diameter Si Crystal
• Generation Rule of the Slip Dislocation in LEC GaAs Crystal
• The Effect of Reduction of Dislocation Density on the Lattice Distortions in Undoped GaAs Single Crystal Grown by LEC Method
• Synchrotron Plane Wave X-Ray Topography of GaAs with a Separate (+, +) Monochro-Collimator
• X-Ray Topography Examination of Lattice Distortions in LEC-Grown GaAs Single Crystals
• Annealing Properties of Defects in B^+- and F^+-Implanted Si Studied Using Monoenergetic Positron Beams
• Fluorine-Related Defects in BF^+_2-Implanted Si Probed by Monoenergetic Positron Beams
• Positron Annihilation in Germanium in Thermal Equilibrium at High Temperature
• Effects of Recoil-Implanted Oxygen on Depth Profiles of Defects and Annealing Processes in P^+-Implanted Si Studied Using Monoenergetic Positron Beams
• Formation of Oxygen-Related Defects Enhanced by Fluorine in BF^+_2-Implanted Si Studied by a Monoenergetic Positron Beam
• Characterization of Metal/GaAs Interfaces by Monoenergetic Positron Beam
• Vacancy-Type Defects in Ion-Implanted Diamonds Probed by Monoenergetic Positron Beams
• In Situ X-Ray Monitoring of Metalorganic Vapor Phase Epitaxy
• Threading Dislocation Reduction in InP on GaAs by Thin Strained Interlayer and its Application to the Fabrication of 1.3-μm-Wavelength Laser on GaAs
• Improved Self-Aligned Structure for GaAlAs High-Power Lasers
• Properties and Degradation of Polarization Reversal of Soft BaTiO_3 Ceramics for Ferroelectric Thin-Film Devices
• Improving the Characteristics of Ultra-Thin-Film Fully-Depleted Metal-Oxide-Semiconductor Field Effect Transistors on SIMOX (Separation by IMplanted OXygen) by Selective Tungsten Deposition on Source and Drain Region
• 300-kilo-Gate Sea-of-Gate Type Gate Arrays Fabricated Using 0.25-μm-Gate Ultra-Thin-Film Fully-Depleted Complementary Metal-Oxide-Semiconductor Separation by IMplanted OXygen (CMOS/SIMOX) Technology with Tungsten-Covered Source and Drain
• Waveform Shaping of a Chemical Oxygen-Iodine Laser Utilizing the Zeeman Effect
• 化学酸素沃素レｰザｰの磁場によるパルス発振
• Study on Zr-Si/W(100) Surface at High Temperatures by Reflection High Energy Electron Diffraction
• 化学酸素沃素レーザの磁場による出力制御
• Study on Zr-Si/W(100) Surface at High Temperatures by Combined Surface Analysis Techniques
• Thermal Equilibrium Defects in Anthracene Probed by Positron Annihilation
• Defects in Czochralski-Grown Silicon Crystals Investigated by Positron Annihilation
• Defects Introduced by Ar Plasma Exposure in GaAs Probed by Monoenergetic Positron Beam
• Numerical Analysis of Underwater Acoustic Lens Using Wide-Angle Parabolic Equation Method
• Preparation and Characterization of Ferroelectric BaTi_(Hf_ Zr_)_O_3 Thin Films by Sol-Gel Process Using Titanium and Zirconium Alkoxides
• Lifetime and Degradation Mechanism of Multilayer Ceramic Actuator
• Evaluation of Electron Trap Levels in SOI Buried Oxides by Transient Photocurrent Spectroscopy
• Evaluation of Electron Trap Levels in SIMOX Buried Oxide by Transient Photocurrent Spectroscopy
• Generation of Slip Dislocations during Czochralski Growth of Semiconductor Crystals Pullen in a Axis
• Search for Objects on the Deep-Sea Floor Using Side Scan Sonar with a Tilted Arrangement Transducer Array
• Sea Trial Results of a Cross Fan Beam Type Sub-Bottom Profiler
• Direct Wafer Bonding Technique Aiming for Free-Material and Free-Orientation Integration of Semiconductor Materials
• Evaluation of the Performance of Deep Sea Survey Sonars from the Results of Search for a Sunken Ship
• Compact and Low-Power-Consumption 40-Gbit/s, 1.55-μm Electro-Absorption Modulators(Optical Active Devices and Modules, Recent Progress in Optoelectronics and Communications)
• Wide-Angle Parabolic Equation Solution of Ocean Acoustic Propagation with Lossy Penetrable Bottom
• Numerical Analysis of Acoustical Propagation in Ocean with Warm and Could Water Mass Used by The Three-Dimensional Wide-Angle Parabolic Equation Method
• Numerical Analysis of Long Range Acoustic Propagation Based on Wide Angle Parabolic Wave Equation
• Three-Dimensional Ray Simulation of Sound Propagation in Ocean with a Geostrophic Current
• Optical Measurement System of Sound Pressure with Refracted Laser Light Propagated through an Acoustic Field
• Estimation of Receiving Waveform of Ultrasonic Aerial Back Sonar Calculated by Finite Difference Time Domain Method (Short Note)
• Analysis of Leakage Current at Pd/AlGaN Schottky Barriers Formed on GaN Free-Standing Substrates
• Numerical Analysis of Acoustical Propagation Characteristics in Central Equatorial Pacific Ocean with Ridges of Seabed Used by Three-Dimensional Parabolic Equation Method
• Comparison of Relaxation Process of Compressive and Tensile Strains in InGaAs Lattice-Mismatched Layers on InP Substrates
• High-Reflectivity InGaP/GaAs Multilayer Reflector Grown by MOCVD for Highly Reliable 0.98-μm Vertical-Cavity Surface-Emitting Lasers
• Strained Lattice Structure Analysis of InGaAsP Multilayers Using Thickness Fringes in Transmission Electron Microscopy Images
• High Resolution X-Ray Elemental Mapping Using 300-kV Field-Emission TEM
• A Sound Intensity Probe Using the Nonlinear Behaviors of Sound Wave : Acoustical Measurements and Instrumentation
• Measurements of Non-Interacting Angle in the Scattering of Sound by Sound for Gases : Acoustical Measurements and Instrumentation
• Parametric Receiving Array as a Practical Sound Receiver : Ultrasonic Transduction
• Molecular Selective Pre-Tilt on Glass Surfaces and Color Difference between Two Twisted States in Surface Stabilized Ferroelectric Liquid Crystal Cells
• Basic Study of Properties of Planate Acoustic Lens Constructed with Phononic Crystal Structure (Special Issue : Ultrasonic Electronics)
• Importance of Controlling Material Constants to Realize Bistable Uniform States in Surface Stabilized Ferroelectric Liquid Crystal Cells
• Transmission electron microscopy study on the effects of the ultrasound contrast agent Levovist on hepatic cells

もっと見る 閉じる

スポンサーリンク