Generation of Slip Dislocations during Czochralski Growth of Semiconductor Crystals Pullen in a <111> Axis
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1986-09-20
著者
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Kitano T
Tokyo Electron Kyushu Ltd. Kumamoto Jpn
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Matsui Junji
Fundamental Research Laboratories, NEC Corporation
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KITANO Tomohisa
Fundamental Research Laboratories, NEC Corporation
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Kitano T
Fundamental Research Laboratories Nec Corporation
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Kitano Tomohisa
Fundamental Reseach Laboratories Nec Corporation
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ONO Haruhiko
Fundamental Research Laboratories, NEC Corporation
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Ono Haruhiko
Fundamental Research Laboratories Nec Corporation
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Matsui J
Himeji Inst. Technol. Hyogo Jpn
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Matsui Junji
Fundamental Research Laboratories Nec Corporation
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Kitano T
Ulsi Device Development Laboratories Nec Corporation
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水木 純一郎
原子力機構量子ビーム
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