Defects in Czochralski-Grown Silicon Crystals Investigated by Positron Annihilation
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-10-15
著者
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TANIGAWA Shoichiro
Institute of Materials Science, The University of Tsukuba
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UEDONO Akira
Institute of Materials Science, University of Tsukuba
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Uedono A
Univ. Tsukuba Tsukuba Jpn
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Uedono Akira
Institute Of Applied Physics University Of Tsukuba
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WEI Long
Institute of Materials Science, University of Tsukuba
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IKARI Atsushi
Electronics R & D Laboratories, Nippon Steel Corporation
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Kitano T
Tokyo Electron Kyushu Ltd. Kumamoto Jpn
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Ikari A
Wacker Nsce Corp. Yamaguchi Jpn
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Ikari Atsushi
Kimura Metamelt Project Erato Jrdc:(present Address) Advanced Technology Research Laboratories Nippo
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Ikari Atsushi
R&d Group Wacker Nsce Corporation
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Wei L
Institute Of Materials Science University Of Tsukuba
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Wei Long
Institute Of Materials Science University Of Tsukuba
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KAWAKAMI Kazuto
Advanced Technology Research Laboratories, Nippon Steel Corporation
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Kawano T
Osaka Univ. Osaka Jpn
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Kawano T
Tokyo Electron Kyushu Ltd. Kumamoto Jpn
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KAWAKAMI Kazuto
Electronics R & D Laboratories, Nippon Steel Corporation
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Kitano T
Fundamental Research Laboratories Nec Corporation
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Tanigawa Shoichiro
Institute Of Applied Physics University Of Tsukuba
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Ikari A
R&d Group Wacker Nsce Corporation
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HAGA Hiroyo
Electronics Research Laboratories, Nippon Steel Corporation
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KAWANO Takao
Isotope Center, University of Tsukuba
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Haga Hiroyo
Electronics Research Laboratories Nippon Steel Corporation
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Tanigawa S
Institute Of Applied Physics University Of Tsukuba
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Kawakami K
Nippon Steel Corp. Kanagawa Jpn
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Kawakami Kazuto
Electronics Research Laboratories Nippon Steel Corporation
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Uedono Akira
Institute of Applied Physics and Graduate School of Pure and Applied Sciences, University of Tsukuba, 1-1-1 Tennodai, Tsukuba 305-8573, Japan
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