Local Bonding Structure of High-Stress Silicon Nitride Film modified by UV Curing for Strained-Silicon Technology beyond 45nm Node SoC Devices
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概要
- 論文の詳細を見る
- 2006-09-13
著者
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UEDONO Akira
Institute of Materials Science, University of Tsukuba
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Uedono Akira
Institute Of Applied Physics University Of Tsukuba
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MIYAGAWA Yoshihiro
Process Technology Development Division, Renesas Technology Corp.
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MURATA Tatsunori
Process Technology Development Division, Renesas Technology Corp.
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NISHIDA Yukio
Process Technology Development Division, Renesas Technology Corp.
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NAKAI Takehiro
Process Technology Development Division, Renesas Technology Corp.
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HATTORI Nobuyoshi
Process Technology Development Division, Renesas Technology Corp.
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MATSUURA Masazumi
Process Technology Development Division, Renesas Technology Corp.
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ASAI Koyu
Process Technology Development Division, Renesas Technology Corp.
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YONEDA Masahiro
Process Technology Development Division, Renesas Technology Corp.
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Hattori Nobuyoshi
Process Technology Development Division Renesas Technology Corp.
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Asai Koyu
Process Technology Development Division Renesas Technology Corp.
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Asai Koyu
Process Development Department Process Technology Development Division Production And Technology Uni
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Nakai Takehiro
Process Technology Development Division Renesas Technology Corp.
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Nishida Yukio
Process Technology Development Div. Renesas Technology Corp.
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Nishida Yukio
Process Technology Development Division Renesas Technology Corp.
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Murata Tatsunori
Process Technology Development Division Renesas Technology Corp.
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Matsuura Masazumi
Process Technology Development Division Renesas Technology Corp.
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Miyagawa Yoshihiro
Process Technology Development Div. Renesas Technology Corp.
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Miyagawa Yoshihiro
Process Technology Development Division Renesas Technology Corp.
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Yoneda Masahiro
Process Development Dept. Process Technology Development Div. Production And Technology Unit Renesas
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Yoneda Masahiro
Process Technology Development Division Renesas Technology Corp.
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Uedono Akira
Institute of Applied Physics and Graduate School of Pure and Applied Sciences, University of Tsukuba, 1-1-1 Tennodai, Tsukuba 305-8573, Japan
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YONEDA Masahiro
Process Development Department, Process Technology Development Division, Production and Technology Unit, Renesas Technology Corporation
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Yoneda Masahiro
Process Development Department, Process Technology Development Division, Production and Technology Unit, Renesas Technology Corp., 4-1 Mizuhara, Itami, Hyogo 664-0005, Japan
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