Evaluation of SOI Substrates by Positron Annihilation

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概要

• 論文の詳細を見る
• 2000-08-28

著者

• TANIGAWA Shoichiro

  Institute of Materials Science, The University of Tsukuba

• UEDONO Akira

  Institute of Materials Science, University of Tsukuba

• Uedono A

  Univ. Tsukuba Tsukuba Jpn

• Uedono Akira

  Institute Of Applied Physics University Of Tsukuba

• Ogura Atsushi

  Silicon Systems Research Laboratories Nec Corporation

• Tanigawa Shoichiro

  Institute Of Applied Physics University Of Tsukuba

• Ogura A

  Meiji University

• Ogura Atsushi

  Silicon Systems Research Laboratories Nec Corp.

• Uedono Akira

  Institute of Applied Physics and Graduate School of Pure and Applied Sciences, University of Tsukuba, 1-1-1 Tennodai, Tsukuba 305-8573, Japan

• Ogura Atsushi

  Silicon System Research Labs., NEC Corp., 1120 Shimokuzawa, Sagamihara 229-1198, Japan

• OGURA Atsushi

  Silicon Systems Res. Labs., System Devices and Fundamental Res., NEC Corp.

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