Oxygen Clusters in Quenched Czochralski-Si Studied by Infrared Spectroscopy and Positron Annihilation
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-04-15
著者
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UEDONO Akira
Institute of Materials Science, University of Tsukuba
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Uedono A
Univ. Tsukuba Tsukuba Jpn
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Uedono Akira
Institute Of Applied Physics University Of Tsukuba
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IKARI Atsushi
Electronics R & D Laboratories, Nippon Steel Corporation
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Ikari A
Wacker Nsce Corp. Yamaguchi Jpn
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Ikari Atsushi
Kimura Metamelt Project Erato Jrdc:(present Address) Advanced Technology Research Laboratories Nippo
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Ikari Atsushi
R&d Group Wacker Nsce Corporation
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Yoda Osamu
Takasaki Radiation Chemistry Research Establishment Japan Atomic Energy Research Institute
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Ikari A
R&d Group Wacker Nsce Corporation
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HAGA Hiroyo
Electronics Research Laboratories, Nippon Steel Corporation
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Haga Hiroyo
Electronics Research Laboratories Nippon Steel Corporation
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UJIHIRA Yusuke
Research Center for Advanced Science and Technology, University of Tokyo
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Ujihira Y
Research Center For Advanced Science And Technology University Of Tokyo
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Ujihira Yusuke
Faculty Of Engineering Tokyo University
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Ujihira Yusuke
Research Center For Advanced Science And Technology The University Of Tokyo
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Uedono Akira
Institute of Applied Physics and Graduate School of Pure and Applied Sciences, University of Tsukuba, 1-1-1 Tennodai, Tsukuba 305-8573, Japan
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