Defects Introduced by Ar Plasma Exposure in GaAs Probed by Monoenergetic Positron Beam

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-10-01

著者

• TANIGAWA Shoichiro

  Institute of Materials Science, The University of Tsukuba

• UEDONO Akira

  Institute of Materials Science, University of Tsukuba

• Uedono A

  Univ. Tsukuba Tsukuba Jpn

• Uedono Akira

  Institute Of Applied Physics University Of Tsukuba

• KAWANO Takao

  Radioisotope Center,University of Tsukuba

• Kitano T

  Tokyo Electron Kyushu Ltd. Kumamoto Jpn

• Kawano Takao

  Radioisotope Center University Of Tsukuba

• Kawano T

  Osaka Univ. Osaka Jpn

• 和田 健司

  大阪府立大学 大学院工学研究科

• Wada K

  Osaka Prefecture University

• Wada K

  Hokkaido Univ. Sapporo Jpn

• Kawano T

  Tokyo Electron Kyushu Ltd. Kumamoto Jpn

• Wada Kazumi

  NTT LSI Laboratories

• NAKANISHI Hideo

  NTT LSI Laboratories

• Kitano T

  Fundamental Research Laboratories Nec Corporation

• Tanigawa Shoichiro

  Institute Of Applied Physics University Of Tsukuba

• Nakanishi H

  Tohoku Univ. Sendai Jpn

• Tanigawa S

  Institute Of Applied Physics University Of Tsukuba

• Nakanishi H

  Department Of Electrical Engineering Science University Of Tokyo

• Uedono Akira

  Institute of Applied Physics and Graduate School of Pure and Applied Sciences, University of Tsukuba, 1-1-1 Tennodai, Tsukuba 305-8573, Japan

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