Influence of Crystal Originated Particles on Gate Oxide Breakdown
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概要
- 論文の詳細を見る
- 1996-11-15
著者
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Iwasaki Toshio
Nsc Electron Corporation
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KAWAKAMI Kazuto
Advanced Technology Research Laboratories, Nippon Steel Corporation
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MATSUMURA Atsuki
Advanced Technology Research Laboratories, Nippon Steel Corporation
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IKEMATSU Yoichi
Advanced Technology Laboratories, Nippon Steel Corp.
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Harada H
Nsc Electron Corporation
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DEAI Hiroyuki
Advanced Technology Research Laboratories, Nippon Steel Corporation
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HARADA Hirofumi
NSC Electron Corporation
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Deai Hiroyuki
Advanced Technology Research Laboratories Nippon Steel Corporation
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Kawakami K
Nippon Steel Corp. Kanagawa Jpn
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Kawakami Kazuto
Advanced Technology Research Laboratories Nippon Steel Corporation
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Kawakami Kazuto
Electronics Research Laboratories Nippon Steel Corporation
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Matsumura Atsuki
Advanced Technology Research Laboratories Nippon Steel Corporation
関連論文
- Microvoid Defects in Nitrogen- and/or Carbon-doped Czochralski-grown Silicon Crystals
- Analysis of Buried-Oxide Dielectric Breakdown Mechanism in Low-Dose Separation by Implanted Oxygen (SIMOX) Substrates Fabricated by Internal Thermal Oxidation (ITOX) Process
- Analysis of Buried-Oxide Dielectric Breakdown Mechanism in Low-Dose SIMOX Structures
- Current-Path Observation in Low-Dose SIMOX (Separation by Implanted Oxygen) Buried-SiO_2 Layer
- Defects in Czochralski-Grown Silicon Crystals Investigated by Positron Annihilation
- Transmission Electron Microscope Observation of Grown-in Defects Detected by Bright-Field Infrared-Laser Interferometer in Czochralski Silicon Crystals
- Positive Magnetoresistances of Carbon Fibers
- Interaction between Substitutional and Interstitial Elements in α iron Studied by First-principles Calculation
- Improvement of Threshold Voltage Uniformity in Ion-Implanted GaAs-Metal-Semiconductor Field-Effect Transistors on Si
- Influence of Crystal Originated Particles on Gate Oxide Breakdown
- Role of TiAl_3 Fine Precipitate in Nucleation of the Primary Al Dendrite Phase during Solidification in Hot-Dip Zn-11%Al-3%Mg-0.2%Si Coated Steel Sheet
- Alloying Reaction of Aluminized Steel Sheet
- Microvoid Defects in Nitrogen- and/or Carbon-doped Czochralski-grown Silicon Crystals