Analysis of Buried-Oxide Dielectric Breakdown Mechanism in Low-Dose SIMOX Structures
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概要
- 論文の詳細を見る
- 1998-09-07
著者
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Kajiyama K
Ion Engineering Res. Inst. Co. Osaka Jpn
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Hamaguchi I
Advanced Technology Research Laboratories Nippon Steel Corporation
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Takayama Seiji
Advanced Technology Research Laboratories Nippon Steel Corporation
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Takayama Seiji
Advanced Semiconductor Materials And Devices Laboratories Nippon Steel Corporation
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YANO Takayuki
Advanced Technology Research Laboratories, Nippon Steel Corp.
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Yano Takayuki
Advanced Technology Research Laboratories Nippon Steel Corporation:(present Address)technical Develo
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KAWAMURA Keisuke
Advanced Technology Research Laboratories, Nippon Steel Corporation
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HAMAGUCHI Isao
Advanced Technology Research Laboratories, Nippon Steel Corporation
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NAGATAKE Youichi
Advanced Technology Research Laboratories, Nippon Steel Corporation
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MATSUMURA Atsuki
Advanced Technology Research Laboratories, Nippon Steel Corporation
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NAGATAKE Yoichi
Advanced Technology Research Laboratories, Nippon Steel Corporation
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Kawamura Keisuke
Advanced Technology Research Laboratories Nippon Steel Corporation
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Kawamura Ken-ichi
Hosono Transparent Electro-active Materials (team) Project Erato Japan Science And Technology Corpor
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Takayama Suguru
Advanced Technology Research Laboratories Nippon Steel Corporation
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Kawamura K
Keio Univ. Yokohama
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Yano Takayuki
Advanced Technology Research Laboratories Nippon Steel Corp.
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Kajiyama K
Ion Engineering Research Institute Co.
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Nagatake Youichi
Advanced Technology Research Laboratories Nippon Steel Corporation
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Yano T
Sumitomo Cement Co. Ltd. Chiba
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Hamaguchi Isao
Advanced Technology Research Laboratories Nippon Steel Corporation
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Matsumura Atsuki
Advanced Technology Research Laboratories Nippon Steel Corporation
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