Oxygen Microwave Plasma Density Enhancement by Surface Waves with a High-Permittivity Material Window

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1999-08-15

著者

• Furukawa M

  Canon Sales Co. Ltd. Tokyo Jpn

• Furukawa M

  Process Equipment Engineering Div. Canon Sales Co. Inc.:(present)utsunomiya Optical Products Operati

• Furukawa Masakazu

  Semiconductor Engineering Laboratory Pioneer Electronics Co.

• SHINAGAWA Keisuke

  Process Equipment Engineering Div., Canon Sales Co., Inc.

• SHINDO Haruo

  Department of Applied Physics, Tokai University

• FURUKAWA Masakazu

  Process Equipment Engineering Div., Canon Sales Co., Inc.

• KAWAMURA Katsufumi

  Process Equipment Division, Canon Sales Corporation

• KOROMOGAWA Takashi

  Department of Applied Physics, Tokai University

• Kamiyo Kouji

  Department of Applied Physics, Tokai University

• Kajiyama K

  Ion Engineering Res. Inst. Co. Osaka Jpn

• Shindo H

  Tokai Univ. Hiratsuka Jpn

• Shindo H

  Yamaguchi Univ. Yamaguchi Jpn

• Shindo Haruo

  Department Of Applied Physics Tokai University

• SHINAGAWA Keisuke

  Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University

• FURUKAWA Masakazu

  Aries Research Group

• Kawamura K

  Process Equipment Division Canon Sales Corporation

• Koromogawa T

  Tokai Univ. Hiratsuka Jpn

• Koromogawa Takashi

  Department Of Applied Physics Tokai University

• Shinagawa K

  Canon Sales Co. Inc. Tokyo Jpn

• Shinagawa Keisuke

  Process Equipment Engineering Div. Canon Sales Co. Inc.

• Kamiyo Kouji

  Department Of Applied Physics Tokai University

• Furukawa Masakazu

  Process Equipment Engineering Div. Cannon Sales Co. Inc.

• Shindo H

  Department Of Electronics Faculty Of Engineering Hiroshima University

• Kawamura Katsufumi

  Process Equipment Division Canon Sales Corporation

• Kawamura Ken-ichi

  Hosono Transparent Electro-active Materials (team) Project Erato Japan Science And Technology Corpor

• Kawamura K

  Keio Univ. Yokohama

• Kawamura K

  Nihon Univ. Tokyo Jpn

• Shindo Haruo

  Department Of Applied Physics

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