Measurement of Fluorocarbon Radicals Generated from C_4F_8/H_2 Inductively Coupled Plasma : Study on SiO_2 Selective Etching Kinetics

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1995-04-30

著者

• 新宮原 正三

  Hiroshima University Graduate School Of Adsm

• Shindo H

  Tokai Univ. Hiratsuka Jpn

• Shindo H

  Yamaguchi Univ. Yamaguchi Jpn

• Shindo H

  Samsung Yokohama Res. Inst. Yokohama Jpn

• HORIIKE Yasuhiro

  Department of Electrical Engineering, Toyo University

• Shindo Haruo

  Faculty of Agriculture, Yamaguchi University

• Kubota Kazuhiro

  Department of Electrical Engineering, Hiroshima University

• Matsumoto Hiroyuki

  Department of Electrical Engineering, Toyo University

• Shingubara Shoso

  Department of Electrical Engineering, Hiroshima University

• Kubota K

  Department Of Biological And Chemical Engineering Faculty Of Technology Gunma University

• Shindo H

  Department Of Electronics Faculty Of Engineering Hiroshima University

• Shindo Haruo

  Faculty Of Engineering Fukuyama University

• Horiike Yasuhiro

  National Institute For Materials Science

• Horiike Yasuhiro

  Department Of Electrical & Electronics Engineering Tokyo University

• Horiike Yasuhiro

  Faculty Of Engineering Hiroshima University

• Horiike Yasuhiro

  Department Of Electrical Engineering Toyo University

• Shingubara Shoso

  Department Of Applied Physics Tokyo Institute Of Technology:vlsi Research Center Toshiba Corporation

• Shindo Haruo

  Faculty Of Agriculture Nagoya University : (present Address) Faculty Of Agriculture Yamaguchi Univer

• 堀池 靖浩

  広島大工

• Kikukawa K

  Semiconductor And Integrated Circuits Division Hitachi Ltd.

• Shindo Haruo

  Faculty Of Agriculture Nagoya University

• Matsumoto Hiroyuki

  Department Of Biochemistry And Molecular Biology University Of Oklahoma Health Sciences Center

• Matsumoto Hiroyuki

  Department Of Biochemistry And Molecular Biology The University Of Oklahoma Health Sciences Center

• Shindo Haruo

  Faculty of Engineering, Fukuyama University

• Kubota Kazuhiro

  Department of Chemistry, Faculty of Engineering, Gunma University

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