Contact Resistance Reduction Using Vacuum Loadlock System and Plasma Dry Cleaning

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2005-06-15

著者

• 新宮原 正三

  Hiroshima University Graduate School Of Adsm

• SAKAUE Hiroyuki

  Graduate School of Advanced Sciences of Matter, Hiroshima University

• SHINGUBARA Shoso

  Graduate School of Advanced Sciences of Matter, Hiroshima University

• TAKAHAGI Takayuki

  Graduate School of Advanced Sciences of Matter, Hiroshima University

• MIYA Hironobu

  Graduate School of Advanced Sciences of Matter, Hiroshima University

• Miya Hironobu

  Graduate School Of Advanced Sciences Of Matter Hiroshima University

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