Analysis of Chemical Structures of Ulthathin Oxynitride Films by X-Ray Photoelectron Spectroscopy and Secondary Ion Mass Spectrometry
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-03-15
著者
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TAKAHAGI Takayuki
Graduate School of Advanced Sciences of Matter, Hiroshima University
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Izumi M
Hitachi Kokusai Electric Inc. Semiconductor Equipment System Laboratory
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Miya Hironobu
Hitachi Kokusai Electric Inc. Semiconductor Equipment System Laboratory
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IZUMI Manabu
Hitachi Kokusai Electric Inc., Semiconductor Equipment System Laboratory
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KONAGATA Shinobu
Hitachi Kokusai Electric Inc., Semiconductor Equipment System Laboratory
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Takahagi Takayuki
Graduate School Of Advanced Science Of Matter Hiroshima University
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Konagata Shinobu
Hitachi Kokusai Electric Inc. Semiconductor Equipment System Laboratory
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Takahagi Takayuki
Graduate School of Advance Science of Matter, Hiroshima University, 1-3 Kagamiyama, Higashi-Hiroshima, Hiroshima 739-8526, Japan
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