Influence of Surface Oxide of Sputtered TaN on Displacement Plating of Cu

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-04-30

著者

• 新宮原 正三

  Hiroshima University Graduate School Of Adsm

• SAKAUE Hiroyuki

  Graduate School of Advanced Sciences of Matter, Hiroshima University

• SHINGUBARA Shoso

  Graduate School of Advanced Sciences of Matter, Hiroshima University

• TAKAHAGI Takayuki

  Graduate School of Advanced Sciences of Matter, Hiroshima University

• WANG Zenglin

  Graduate School of Advanced Science of Matter, Hiroshima University

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