Adsorbed Water on a Silicon Wafer Surface Exposed to Atmosphere : Semiconductors

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2001-11-15

著者

• 新宮原 正三

  関西大学大学院工学研究科

• 新宮原 正三

  Hiroshima University Graduate School Of Adsm

• 新宮原 正三

  広島大学先端物質科学研究科

• SAKAUE Hiroyuki

  Graduate School of Advanced Sciences of Matter, Hiroshima University

• SHINGUBARA Shoso

  Graduate School of Advanced Sciences of Matter, Hiroshima University

• TAKAHAGI Takayuki

  Graduate School of Advanced Sciences of Matter, Hiroshima University

• Takahagi Takayuki

  Hiroshima University, Graduate School of ADSM

• Shingubara Shoso

  Graduate School Of Advanced Sciences Of Matter Hiroshima University

• Sakaue H

  Hiroshima University Graduate School Of Adsm

• Sakaue Hiroyuki

  Graduate School Of Advanced Science Of Matter Hiroshima University

• Takahagi Takayuki

  Hiroshima University Graduate School Of Adsm

• Takahagi Takayuki

  Graduate School Of Advanced Science Of Matter Hiroshima University

• Takahagi Takayuki

  Graduate School of Advance Science of Matter, Hiroshima University, 1-3 Kagamiyama, Higashi-Hiroshima, Hiroshima 739-8526, Japan

• Shingubara Shoso

  Graduate School of Advanced Science of Matter, Hiroshima University, 1-3-1 Kagamiyama, Higashi-Hiroshima 739-8530, Japan

• Shingubara Shoso

  Graduate School of Advanced Science of Matter, Hiroshima University, 1-3-1 Kagamiyama, Higashi-Hiroshima 739-8526, Japan

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