Adsorption of Dibutyl Phthalate and Dioctyl Phthalate on Si Substrate
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概要
- 論文の詳細を見る
The behaviors of organic compounds such as dibutyl phthalate (DBP) or dioctyl phthalate (DOP) on a Si substrate are investigated by gas chromatograph and mass analysis (GC–MS). DBP or DOP source is set in a chemically clean booth, and organic amount is measured in air and on the substrate. At various concentrations of DBP or DOP, organic adsorption amount is measured and this amount is expressed by the Langmuir equation. In a mixed-gas atmosphere, the amounts of DBP and DOP are measured and it is clear that DBP concentration decreases when the total organic amount exceeds the saturated adsorption amount on the substrate. This phenomenon is understood as the replacement of DBP by DOP. In this paper, we describe the adsorption amount quantitatively in individual atmosphere of DBP or DOP and a mixed-gas atmosphere.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-06-15
著者
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Miya Hironobu
Semiconductor Equipment Division Hitachi Kokusai Electric Inc.
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SASAJIMA Ryota
Semiconductor Equipment Division, Hitachi Kokusai Electric Inc.
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NAKAMURA Naoto
Semiconductor Equipment Division, Hitachi Kokusai Electric Inc.
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Takami Eiko
Semiconductor Equipment Division Hitachi Kokusai Electric Inc.
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Takahagi Takayuki
Graduate School of Advance Science of Matter, Hiroshima University, 1-3 Kagamiyama, Higashi-Hiroshima, Hiroshima 739-8526, Japan
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Takami Eiko
Semiconductor Equipment Division, Hitachi Kokusai Electric Inc., 2-1 Yasuuchi, Yatsuo-machi, Nei-gun, Toyama 939-2393, Japan
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Miya Hironobu
Semiconductor Equipment Division, Hitachi Kokusai Electric Inc., 2-1 Yasuuchi, Yatsuo-machi, Nei-gun, Toyama 939-2393, Japan
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