Corrosion Protect DLC Coating on Steel and Hastelloy

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概要

• 論文の詳細を見る
• Japan Institute of Metalsの論文
• 2008-06-01

著者

• Miya Hironobu

  Semiconductor Equipment Division Hitachi Kokusai Electric Inc.

• WANG Jie

  Semiconductor Equipment Division, Hitachi Kokusai Electric Inc.

• Wang Jie

  Semiconductor Equipment Division Hitachi Kokusai Electric Inc.

関連論文

• Metal-Organic Chemical Vapor Deposition of HfO_2 by Alternating Supply of Tetrakis-Diethylamino-Hafnium and Remote-Plasma Oxygen
• Adsorption of Dibutyl Phthalate and Dioctyl Phthalate on Si Substrate
• Corrosion Protect DLC Coating on Steel and Hastelloy
• Impact of Hf Metal Predeposition on the Properties of HfO2 Grown by Physical and Chemical Vapor Deposition
• Adsorption of Dibutyl Phthalate and Dioctyl Phthalate on Si Substrate
• Metalorganic Chemical Vapor Deposition of HfO2 Films through the Alternating Supply of Tetrakis(1-methoxy-2-methyl-2-propoxy)-Hafnium and Remote-Plasma Oxygen

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