SHINGUBARA Shoso | Graduate School of Advanced Sciences of Matter, Hiroshima University

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概要

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著作論文

Fabrication of Carbon Nanotube and Nanorod Arrays Using Nanoporous Templates
Contact Resistance Reduction Using Vacuum Loadlock System and Plasma Dry Cleaning
Effect of Additives on Hole Filling Characteristics of Electroless Copper Plating
Highly Adhesive Electroless Cu Layer Formation Using an Ultra Thin Ionized Cluster Beam (ICB)-Pd Catalytic Layer for Sub-100 nm Cu Interconnections
Thickness Dependences of Nucleation and Annihilation Fields of Magnetic Vortices in Submicron Supermalloy Dots
Influence of Surface Oxide of Sputtered TaN on Displacement Plating of Cu
Computer-Aided Chemistry Estimation Method of Electronic-Polarization Dielectric Constants for the Molecular Design of Low-k Materials
Formation of Al Dot Hexagonal Array on Si Using Anodic Oxidation and Selective Etching : Surfaces, Interfaoes, and Films
Adsorbed Water on a Silicon Wafer Surface Exposed to Atmosphere : Semiconductors
Study of a Dielectric Constant Due to Electronic Polarization Using a Semiempirical Molecular Orbital Method I : Semiconductors
Scanning Electron Microscope Observation of Heterogeneous Three-Dimensional Nanoparticle Arrays Using DNA : Surfaces, Interfaces, and Films
Epitaxial Silicon Growth by Load-Lock Low Pressure Chemical Vapor Deposition System for Elevated Source/Drain Formation

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