Kubota Kazuhiro | Department of Electrical Engineering, Hiroshima University
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概要
関連著者
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Kubota Kazuhiro
Department of Electrical Engineering, Hiroshima University
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Shindo H
Tokai Univ. Hiratsuka Jpn
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Shindo H
Samsung Yokohama Res. Inst. Yokohama Jpn
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HORIIKE Yasuhiro
Department of Electrical Engineering, Toyo University
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Shindo Haruo
Faculty of Agriculture, Yamaguchi University
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Kubota K
Department Of Biological And Chemical Engineering Faculty Of Technology Gunma University
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Shindo H
Department Of Electronics Faculty Of Engineering Hiroshima University
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Horiike Yasuhiro
National Institute For Materials Science
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Horiike Yasuhiro
Department Of Electrical & Electronics Engineering Tokyo University
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Horiike Yasuhiro
Faculty Of Engineering Hiroshima University
著作論文
- Measurement of Fluorocarbon Radicals Generated from C_4F_8/H_2 Inductively Coupled Plasma : Study on SiO_2 Selective Etching Kinetics
- Microloading Effect in Highty Selective Si0_2 Contact Hole Etching Employing Inductively Coupled Plasma
- Effect of Magnetic Field to Etching Characteristics of Inductively Coupled Plasma ( Plasma Processing)
- Microwave Irradiation for Chemical Modification of Carbon Nanotubes for Better Dispersion
- Microwave Irradiation for Chemical Modification of Carbon Nanotubes for Better Dispersion