Shindo H | Tokai Univ. Hiratsuka Jpn
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概要
関連著者
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Shindo H
Tokai Univ. Hiratsuka Jpn
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Shindo H
Department Of Electronics Faculty Of Engineering Hiroshima University
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Shindo H
Yamaguchi Univ. Yamaguchi Jpn
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Horiike Yasuhiro
Faculty Of Engineering Hiroshima University
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Horiike Yasuhiro
National Institute For Materials Science
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Horiike Yasuhiro
Department Of Electrical Engineering Toyo University
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堀池 靖浩
広島大工
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堀池 靖浩
物質･材料研究機構
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Shindo Haruo
Department Of Applied Physics Tokai University
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HORIIKE Yasuhiro
Department of Electrical Engineering, Toyo University
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Horiike Yasuhiro
Faculty Of Engineering Toyo University
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Horiike Yasuhiro
Department Of Electrical & Electronics Engineering Tokyo University
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Shindo Haruo
Department Of Applied Physics
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Shindo Haruo
Faculty of Agriculture, Yamaguchi University
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Horiike Yasuhiro
Research Center For Integrated Systems Hiroshima University:(present Address)department Of Electrica
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Shindo Haruo
Faculty Of Agriculture Nagoya University
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Shindo Haruo
Faculty Of Agriculture Nagoya University : (present Address) Faculty Of Agriculture Yamaguchi Univer
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SHINDO Haruo
Department of Applied Physics, Tokai University
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Shindo H
Samsung Yokohama Res. Inst. Yokohama Jpn
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Horiike Yasuhiro
Toshiba Vlsi Research Center
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Horiike Yasuhiro
Department Of Electrical Engineering Hiroshima University
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Furukawa M
Canon Sales Co. Ltd. Tokyo Jpn
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Furukawa M
Process Equipment Engineering Div. Canon Sales Co. Inc.:(present)utsunomiya Optical Products Operati
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Furukawa Masakazu
Semiconductor Engineering Laboratory Pioneer Electronics Co.
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FURUKAWA Masakazu
Aries Research Group
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Kawamura K
Process Equipment Division Canon Sales Corporation
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Fukasawa Takayuki
Faculty Of Engineering Fukuyama University:(present Address)2nd Development Engineering Dpt. Tokyo E
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Kawamura Ken-ichi
Hosono Transparent Electro-active Materials (team) Project Erato Japan Science And Technology Corpor
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Kawamura K
Nihon Univ. Tokyo Jpn
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Fukasawa Teruichiro
Department Of Physics Science University Of Tokyo:(permanent Address)toshiba Manufacturing Engineeri
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KUSABA Kouta
Department of Applied Physics, Tokai University
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FURUKAWA Masakazu
Process Equipment Engineering Div., Canon Sales Co., Inc.
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KOROMOGAWA Takashi
Department of Applied Physics, Tokai University
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Kajiyama K
Ion Engineering Res. Inst. Co. Osaka Jpn
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SHINAGAWA Keisuke
Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University
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Koromogawa T
Tokai Univ. Hiratsuka Jpn
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Koromogawa Takashi
Department Of Applied Physics Tokai University
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Shinagawa K
Canon Sales Co. Inc. Tokyo Jpn
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Shinagawa Keisuke
Process Equipment Engineering Div. Canon Sales Co. Inc.
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Nakamura A
Faculty Of Pharmacy And Parmaceutical Sciences Fukuyama University
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Kusaba Kouta
Department Of Applied Physics Tokai University
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Furukawa Masakazu
Process Equipment Engineering Div. Cannon Sales Co. Inc.
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Narai Akira
Faculty Of Engineering Hiroshima University
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Fujii Takashi
Department Of Cardiology Hiroshima General Hospital
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SHINAGAWA Keisuke
Process Equipment Engineering Div., Canon Sales Co., Inc.
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KAWAMURA Katsufumi
Process Equipment Division, Canon Sales Corporation
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Kubota Kazuhiro
Department of Electrical Engineering, Hiroshima University
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FUKASAWA Takayuki
Department of Electrical Engineering, Hiroshima University
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NAKAMURA Akihiro
Department of Electrical Engineering, Hiroshima University
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Kusaba K
Tohoku Univ. Miyagi Jpn
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Fujii Toru
General R&d Lab. Taiyo Yuden Co. Ltd.
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Kubota K
Department Of Biological And Chemical Engineering Faculty Of Technology Gunma University
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FUJII Syuitsu
ADTEC Co., Ltd.
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CHINZEI Yasuhiko
Department of Electrical & Electronics Engineering, Tokyo University
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FUJII Takashi
Central Research Institute of Electric Power Industry
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Fujii Syuitsu
Adtec Co. Ltd.
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Fujii T
Toyohashi Univ. Technol. Toyohashi Jpn
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Fujii Toshio
Fujitsu Laboratories Lid.
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Fujii Toshio
Fujitsu Laboratories Limited
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Fujii Sadao
Central Research Laboratory Kanegafuchi Chemical Industry Co.
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Fujii S
Matsushita Electronics Corp. Kyoto Jpn
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Fujii T
Central Research Institute Of Electric Power Industry
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Kawamura K
Keio Univ. Yokohama
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Furuta Shigeru
Department Of Electric And Computer Engineering Nagoya Institute Of Technology
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Chinzei Yasuhiko
Department Of Electrical & Electronics Engineering Tokyo University
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Kikukawa K
Semiconductor And Integrated Circuits Division Hitachi Ltd.
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Fujii S
Adtec Plasma Technol. Co. Ltd. Fukuyama Jpn
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Fujii Takashi
Exploratory Research Laboratories Fujisawa Pharmaceutical Co. Ltd.
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Nakamura Akihiro
Department Of Applied Chemistry And Biotechnology Faculty Of Engineering Yamanashi University
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Fujii Takashi
Department Of Applied Physics And Chemistry The University Of Electro-communications
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Kubota Kazuhiro
Department of Chemistry, Faculty of Engineering, Gunma University
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YAMAMOTO Jin
Process Equipment Engineering Div., Canon Sales Co., Inc.
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Horiike Yasuhiro
Faculty of Engineering, Toyo University
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Yamamoto J
Process Equipment Engineering Div. Canon Sales Co. Inc.
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ICHIKI Takanori
Department of Electrical & Electronics Engineering, Toyo University
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ICHIKI Takanori
the Department of Electric and Electronic Engineering, Tokyo University
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Shindo Haruo
Faculty Of Engineering Fukuyama University
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Kawamura Katsufumi
Process Equipment Division Canon Sales Corporation
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URAYAMA Takuya
Department of Applied Physics, Tokai University
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Urayama Takuya
Department Of Applied Physics Tokai University:research And Development Division Adtec Co. Ltd.
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SAWA Yoshio
Tsukuba Research, Drug Safety Research Laboratories, Eisai Co., Ltd.
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Ichiki T
Univ. Tokyo Tokyo Jpn
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Ichiki Takanori
Department Of Electric And Electronic Engineering Toyo University
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Sawa Yoshio
Tsukuba Research Drug Safety Research Laboratories Eisai Co. Ltd.
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Ichiki Takanori
Department of Bioengineering, Graduate School of Engineering, The University of Tokyo, Bunkyo, Tokyo 113-8656, Japan
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Fujii Takashi
Department Of Medicine And Clinical Science Yamaguchi University Graduate School Of Medicine
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新宮原 正三
Hiroshima University Graduate School Of Adsm
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SINAGAWA Keisuke
Process Equipment Division, Canon Sales Corporation
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Kamiyo Kouji
Department of Applied Physics, Tokai University
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FURUKAWA Masakazu
Canon Sales Corporation, INC., Process Equipment Division
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SAITO Naoki
Canon Sales Corporation, INC., Process Equipment Division
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KAWAMURA Katsufumi
Canon Sales Corporation, INC., Process Equipment Division
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Shindo H
Faculty Of Agriculture Yamaguchi University
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YAMASHITA Akihito
Department of Applied Physics, Tokai University
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Matsumoto Hiroyuki
Department of Electrical Engineering, Toyo University
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Shingubara Shoso
Department of Electrical Engineering, Hiroshima University
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Fukasawa Takayuki
Faculty of Engineering, Fukuyama University
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Nakamura Akihiro
Faculty of Engineering, Hiroshima University
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FUKASAWA Takayuki
2nd Development Engineering Dept., Tokyo Electron Yamanshi Limited
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JIWARI Nobuhiro
Department of Electrical Engineering, Hiroshima University
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NOUDA Tatuki
Department of Electrical Engineering, Hiroshima University
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Kamiyo Kouji
Department Of Applied Physics Tokai University
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Kusaba K
Tokai Univ. Hiratsuka Jpn
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AOYAGI Hitoshi
Department of Applied Physics, Tokai University
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OGATA Makoto
Department of Electrical & Electronics Engineering, Tokyo University
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SUNADA Tsuyoshi
Research and Development Division, ULVAC Japan Ltd.
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ITOH Masahiro
Research and Development Division, ULVAC Japan Ltd.
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HAYASHI Toshio
Research and Development Division, ULVAC Japan Ltd.
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ITATANI Ryohei
Niihama National College of Technology
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KUROSAKI Ryo
Manufacturing Technology Division, Fujitsu Ltd.
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KIKUCHI Jyun
Manufacturing Technology Division, Fujitsu Ltd.
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IKEGAMI Naokatsu
VLSI R〓D Center, Oki Electric Industry Co., Ltd.
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FUKAZAWA Takayuki
2nd Development Engineering Dpt, Tokyo Electron
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Aoyagi Hitoshi
Department Of Applied Physics Tokai University
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Kikuchi J
Axiomatic Inc. Tokyo Jpn
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Horiike Yasuhiro
National Inst. For Materials Sci. Ibaraki Jpn
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Horiike Yasuhiro
Biomaterials Center National Institute For Materials Science
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Shingubara Shoso
Department Of Applied Physics Tokyo Institute Of Technology:vlsi Research Center Toshiba Corporation
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Shindo Haruo
Faculty Of Engineering Hiroshima University
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Niimi Hirofumi
Department of Applied Physics, Tokai University
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SAWA Yoshio
Department of Applied Physics, Tokai University
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SAWA Yoshio
Faculty of Engineering, Fukuyama University
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Ogata Makoto
Department Of Electrical & Electronics Engineering Tokyo University
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Kurosaki Ryo
Photonics Research Institute National Institute Of Advanced Industrial Science And Technology (aist)
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Nouda Tatuki
Department Of Electrical Engineering Hiroshima University
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Niimi Hirofumi
Department Of Applied Physics Tokai University
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IBRAHIM Saiyed
Faculty of Agriculture, Yamaguchi University
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Ibrahim Saiyed
Faculty Of Agriculture Yamaguchi University
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Jiwari Nobuhiro
Department Of Electrical Engineering Hiroshima University
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Ogata Makoto
Department Of Bioscience Graduate School Of Science And Technology Shizuoka University
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Fukazawa Takayuki
2nd Development Engineering Dpt Tokyo Electron
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Saito Naoki
Canon Sales Corporation Inc. Process Equipment Division
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Sunada Tsuyoshi
Research And Development Division Ulvac Japan Ltd.
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Ikegami Naokatsu
Vlsi R〓d Center Oki Electric Industry Co. Ltd.
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Ikegami Naokatsu
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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Horiike Yasuhiro
Development Of Material Science School Of Engineering University Of Tokyo
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Yamashita A
Department Of Applied Physics Tokai University
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Itoh Masahiro
Research And Development Division Ulvac Japan Ltd.
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Matsumoto Hiroyuki
Department Of Biochemistry And Molecular Biology University Of Oklahoma Health Sciences Center
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Horiike Yasuhiro
World Premier International (wpi) Research Center Initiative International Center For Materials Nano
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Hayashi Toshio
Research & Development Division Ulvac Japan Ltd.
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Hayashi Toshio
Research And Development Division Ulvac Japan Ltd.
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Yamashita Akihito
Department Of Applied Physics Tokai University
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Matsumoto Hiroyuki
Department Of Biochemistry And Molecular Biology The University Of Oklahoma Health Sciences Center
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Ichiki Takanori
Department of Bioengineering, School of Engineering, The University of Tokyo, 2-11-16 Yayoi, Bunkyo-ku, Tokyo 113-8656, Japan
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Shindo Haruo
Faculty of Engineering, Fukuyama University
著作論文
- Ashing Properties in a Surface-Wave Mode Plasma with a Quartz Window
- Surface Wave Plasma Production Employing High Permittivity Material for Microwave Window : Nuclear Science, Plasmas, and Electric Discharges
- Ashing Properties in a Surface-Wave Mode Plasma with a High-Permittivity Alumina Window : Semiconductors
- Oxygen Microwave Plasma Density Enhancement by Surface Waves with a High-Permittivity Material Window
- Production of Large-Diameter Microwave Plasma with a High-Permittivity Material Window
- Negative Ion Assisted Silicon Oxidation in Downstream of Microwave Plasma
- Measurement of Fluorocarbon Radicals Generated from C_4F_8/H_2 Inductively Coupled Plasma : Study on SiO_2 Selective Etching Kinetics
- RF Selfbias Voltage and Sheath Width in Inductively Coupled Chlorine Plasma
- Microloading Effect in Highty Selective Si0_2 Contact Hole Etching Employing Inductively Coupled Plasma
- Effect of Magnetic Field to Etching Characteristics of Inductively Coupled Plasma ( Plasma Processing)
- High Rate and Highly Selective SiO_2 Etching Employing Inductively Coupled Plasma
- RF Self-Bias Characteristics in Inductively Coupled Plasma
- Enhancement of Negative-Ion-Assisted Silicon Oxidation by Radio-Frequency Bias
- Floating Potential in Negative-Ion-Containing Plasma
- Development and Plasma Characteristics Measurement of Planar-Type Magnetic Neutral Loop Discharge Etcher
- Highly Selective SiO_2/Si Etching and Related Kinetics in Time-Modulated Helicon Wave Plasma
- SiO_2 Etching Employing Inductively Coupled Plasma with Hot Inner Wall
- Electron Energy Control in Inductively Coupled Plasma Employing Multimode Antenna
- Thin Film Detection Employing Frequency Shift in Sheath Current Oscillation
- Excitation of Sheath Oscillating Current by Superimposing Pulse Voltage
- Silicon Etching Employing Negative Ion in SF_6 Plasma
- Analysis of Water-Stable Soil Aggregates with Special Reference to Degree of Aggregation