Furukawa M | Process Equipment Engineering Div. Canon Sales Co. Inc.:(present)utsunomiya Optical Products Operati

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概要

• 同名の論文著者
• Process Equipment Engineering Div. Canon Sales Co. Inc.:(present)utsunomiya Optical Products Operatiの論文著者

関連著者

• Furukawa M

  Canon Sales Co. Ltd. Tokyo Jpn

• Furukawa M

  Process Equipment Engineering Div. Canon Sales Co. Inc.:(present)utsunomiya Optical Products Operati

• Furukawa Masakazu

  Semiconductor Engineering Laboratory Pioneer Electronics Co.

• FURUKAWA Masakazu

  Aries Research Group

• SHINDO Haruo

  Department of Applied Physics, Tokai University

• Shindo H

  Tokai Univ. Hiratsuka Jpn

• Shindo H

  Yamaguchi Univ. Yamaguchi Jpn

• Shindo Haruo

  Department Of Applied Physics Tokai University

• SHINAGAWA Keisuke

  Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University

• Kawamura K

  Process Equipment Division Canon Sales Corporation

• Shinagawa K

  Canon Sales Co. Inc. Tokyo Jpn

• Shinagawa Keisuke

  Process Equipment Engineering Div. Canon Sales Co. Inc.

• Shindo H

  Department Of Electronics Faculty Of Engineering Hiroshima University

• Kawamura Ken-ichi

  Hosono Transparent Electro-active Materials (team) Project Erato Japan Science And Technology Corpor

• Kawamura K

  Nihon Univ. Tokyo Jpn

• Shindo Haruo

  Department Of Applied Physics

• FURUKAWA Masakazu

  Process Equipment Engineering Div., Canon Sales Co., Inc.

• Kajiyama K

  Ion Engineering Res. Inst. Co. Osaka Jpn

• Furukawa Masakazu

  Process Equipment Engineering Div. Cannon Sales Co. Inc.

• SHINAGAWA Keisuke

  Process Equipment Engineering Div., Canon Sales Co., Inc.

• YAMAMOTO Jin

  Process Equipment Engineering Div., Canon Sales Co., Inc.

• KUSABA Kouta

  Department of Applied Physics, Tokai University

• KAWAMURA Katsufumi

  Process Equipment Division, Canon Sales Corporation

• KOROMOGAWA Takashi

  Department of Applied Physics, Tokai University

• Koromogawa T

  Tokai Univ. Hiratsuka Jpn

• Koromogawa Takashi

  Department Of Applied Physics Tokai University

• Kusaba K

  Tohoku Univ. Miyagi Jpn

• Yamamoto J

  Process Equipment Engineering Div. Canon Sales Co. Inc.

• Kusaba Kouta

  Department Of Applied Physics Tokai University

• Kawamura K

  Keio Univ. Yokohama

• Kawamura Katsufumi

  Process Equipment Division Canon Sales Corporation

• ZAIMA Shigeaki

  Center for Cooperative Research in Advanced Science and Technology, Nagoya University

• SINAGAWA Keisuke

  Process Equipment Division, Canon Sales Corporation

• Kamiyo Kouji

  Department of Applied Physics, Tokai University

• FURUKAWA Masakazu

  Canon Sales Corporation, INC., Process Equipment Division

• SAITO Naoki

  Canon Sales Corporation, INC., Process Equipment Division

• KAWAMURA Katsufumi

  Canon Sales Corporation, INC., Process Equipment Division

• OHGAWARA Shoji

  Process Equipment Engineering Div., Canon Sales Co., Inc.

• Ohgawara Shoji

  Process Equipment Engineering Div. Canon Sales Co. Inc.

• Zaima Shigeaki

  Center For Cooperative Research In Advanced Science & Technology Nagoya University

• Kamiyo Kouji

  Department Of Applied Physics Tokai University

• Saito Naoki

  Canon Sales Corporation Inc. Process Equipment Division

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著作論文

• Ashing Properties in a Surface-Wave Mode Plasma with a Quartz Window
• Surface Wave Plasma Production Employing High Permittivity Material for Microwave Window : Nuclear Science, Plasmas, and Electric Discharges
• Ashing Properties in a Surface-Wave Mode Plasma with a High-Permittivity Alumina Window : Semiconductors
• Oxygen Microwave Plasma Density Enhancement by Surface Waves with a High-Permittivity Material Window
• Production of Large-Diameter Microwave Plasma with a High-Permittivity Material Window
• Effects of Nitrogen Addition to Microwave Oxygen Plasma in Surface Wave with Disk-Plate Window and Photoresist Ashing

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