FURUKAWA Masakazu | Aries Research Group
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概要
関連著者
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FURUKAWA Masakazu
Aries Research Group
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Furukawa M
Canon Sales Co. Ltd. Tokyo Jpn
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Furukawa Masakazu
Semiconductor Engineering Laboratory Pioneer Electronics Co.
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Furukawa M
Process Equipment Engineering Div. Canon Sales Co. Inc.:(present)utsunomiya Optical Products Operati
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Shindo Haruo
Department Of Applied Physics Tokai University
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Shindo Haruo
Department Of Applied Physics
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SHINDO Haruo
Department of Applied Physics, Tokai University
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Shindo H
Tokai Univ. Hiratsuka Jpn
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Shindo H
Yamaguchi Univ. Yamaguchi Jpn
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SHINAGAWA Keisuke
Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University
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Kawamura K
Process Equipment Division Canon Sales Corporation
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Shinagawa K
Canon Sales Co. Inc. Tokyo Jpn
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Shinagawa Keisuke
Process Equipment Engineering Div. Canon Sales Co. Inc.
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Shindo H
Department Of Electronics Faculty Of Engineering Hiroshima University
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Kawamura Ken-ichi
Hosono Transparent Electro-active Materials (team) Project Erato Japan Science And Technology Corpor
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Kawamura K
Nihon Univ. Tokyo Jpn
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FURUKAWA Masakazu
Process Equipment Engineering Div., Canon Sales Co., Inc.
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Kajiyama K
Ion Engineering Res. Inst. Co. Osaka Jpn
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Furukawa Masakazu
Process Equipment Engineering Div. Cannon Sales Co. Inc.
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SHINAGAWA Keisuke
Process Equipment Engineering Div., Canon Sales Co., Inc.
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YAMAMOTO Jin
Process Equipment Engineering Div., Canon Sales Co., Inc.
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KUSABA Kouta
Department of Applied Physics, Tokai University
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KAWAMURA Katsufumi
Process Equipment Division, Canon Sales Corporation
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KOROMOGAWA Takashi
Department of Applied Physics, Tokai University
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Koromogawa T
Tokai Univ. Hiratsuka Jpn
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Koromogawa Takashi
Department Of Applied Physics Tokai University
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Kusaba K
Tohoku Univ. Miyagi Jpn
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Yamamoto J
Process Equipment Engineering Div. Canon Sales Co. Inc.
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Kusaba Kouta
Department Of Applied Physics Tokai University
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Kawamura K
Keio Univ. Yokohama
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Furukawa Masakazu
Semiconductor Engineering Laboratory Pioneer Electronic Co.
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HARA Tamio
Toyota Technological Institute
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HARA Tohru
Electrical Engineering, Hosei University
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SUZUKI Hidenori
Electrical Engineering, Hosei University
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Suzuki H
Communications Res. Lab. Kobe Jpn
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Hara Tohru
Electrical Engineering Hosei University
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Kawamura Katsufumi
Process Equipment Division Canon Sales Corporation
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Sakai H
Department Of Electrical And Electronic Engineering Meijo University
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Suzuki H
Univ. Tokyo Tokyo Jpn
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ZAIMA Shigeaki
Center for Cooperative Research in Advanced Science and Technology, Nagoya University
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SINAGAWA Keisuke
Process Equipment Division, Canon Sales Corporation
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Kamiyo Kouji
Department of Applied Physics, Tokai University
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FURUKAWA Masakazu
Canon Sales Corporation, INC., Process Equipment Division
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SAITO Naoki
Canon Sales Corporation, INC., Process Equipment Division
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KAWAMURA Katsufumi
Canon Sales Corporation, INC., Process Equipment Division
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AMEMIYA Kimio
Semiconductor Engineering Laboratory, Pioneer Electronic Co.
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KAMEGAYA Hiroshi
Department of Engineering, Tamagawa University
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ONO Ikuo
Semiconductor Equipment Engineering Div., Canon Sales Inc.
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HARUNA Katsuji
Department of Engineering, Tamagawa University
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Ono I
Toyota Technological Inst. Nagoya Jpn
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Kamegaya Hiroshi
Department Of Engineering Tamagawa University
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Haruna Katsuji
Department Of Electronics Faculty Of Engineering Tamagawa University
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Haruna Katsuji
Department Of Engineering Tamagawa University
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OHGAWARA Shoji
Process Equipment Engineering Div., Canon Sales Co., Inc.
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Amemiya Kimio
Semiconductor Engineering Laboratory Pioneer Electronic Co.
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Ohgawara Shoji
Process Equipment Engineering Div. Canon Sales Co. Inc.
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Zaima Shigeaki
Center For Cooperative Research In Advanced Science & Technology Nagoya University
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Kamiyo Kouji
Department Of Applied Physics Tokai University
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Shindo Haruo
Department Of Electronics Tokai University
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Ono Ikuo
Semiconductor Equipment Engineering Div. Canon Sales Inc.
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Furukawa Masakazu
Aries Research Inc.
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Kimura Yasuhito
Department of Electronics, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259-1259, Japan
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Kawaguchi Hideki
Muroran Institute of Technology, 27-1 Mizumoto-cho, Muroran, Hokkaido 050-8585, Japan
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Kagami Shin
Muroran Institute of Technology, 27-1 Mizumoto-cho, Muroran, Hokkaido 050-8585, Japan
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Kagami Shin
Muroran Institute Of Technology
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Kawaguchi Hideki
Muroran Institute Of Technology
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Kimura Yasuhito
Department Of Electronics Tokai University
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Saito Naoki
Canon Sales Corporation Inc. Process Equipment Division
著作論文
- Ashing Properties in a Surface-Wave Mode Plasma with a Quartz Window
- Surface Wave Plasma Production Employing High Permittivity Material for Microwave Window : Nuclear Science, Plasmas, and Electric Discharges
- Ashing Properties in a Surface-Wave Mode Plasma with a High-Permittivity Alumina Window : Semiconductors
- Oxygen Microwave Plasma Density Enhancement by Surface Waves with a High-Permittivity Material Window
- Production of Large-Diameter Microwave Plasma with a High-Permittivity Material Window
- Reflow of PSG Layers by Halogen Lamp Short Duration Heating Technique
- Contact Resistance of Al/Si Ohmic Electrodes Formed by Rapid Lamp Sintering.
- Two Step Rapid Heating Reflow of Borophosphosilicate Glass and Estimation for a Coefficient of Heating Delay by Thermal Analyses
- Effects of Nitrogen Addition to Microwave Oxygen Plasma in Surface Wave with Disk-Plate Window and Photoresist Ashing
- A New Method of Line Plasma Production by Microwave in a Narrowed Rectangular Waveguide