A New Method of Line Plasma Production by Microwave in a Narrowed Rectangular Waveguide
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概要
- 論文の詳細を見る
A newly proposed method of large-scaled line plasma production is studied with the microwave of 2.45 GHz. In this method, the narrowed rectangular waveguide of 62.0 mm in width, which is close to the cutoff condition for TE10 mode, is examined to produce 1.1 m line plasma. The Ar plasma thus produced becomes a very high density, as high as more than 6 times larger than the cutoff density, and its axial uniformity is within 5% in the entire plasma. It is also found that the short plunger equipped at the end of waveguide produces a standing wave.
- Japan Society of Applied Physicsの論文
- 2009-12-25
著者
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Shindo Haruo
Department Of Applied Physics Tokai University
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FURUKAWA Masakazu
Aries Research Group
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Shindo Haruo
Department Of Electronics Tokai University
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Furukawa Masakazu
Aries Research Inc.
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Kimura Yasuhito
Department of Electronics, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259-1259, Japan
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Kawaguchi Hideki
Muroran Institute of Technology, 27-1 Mizumoto-cho, Muroran, Hokkaido 050-8585, Japan
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Kagami Shin
Muroran Institute of Technology, 27-1 Mizumoto-cho, Muroran, Hokkaido 050-8585, Japan
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Kagami Shin
Muroran Institute Of Technology
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Kawaguchi Hideki
Muroran Institute Of Technology
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Shindo Haruo
Department Of Applied Physics
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Kimura Yasuhito
Department Of Electronics Tokai University
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