Long Line-Shaped Microwave Plasma Generation Employing a Narrow Rectangular Waveguide
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概要
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Long line-shaped microwave plasma is generated employing a narrow rectangular waveguide. The wavelength of a microwave in a waveguide increases in accordance with the narrowing of the width of the waveguide. A narrow and flat rectangular waveguide is produced with internal dimensions of 500 mm length, 62 mm width and 5 mm height. The waveguide is connected to a TE10 mode rectangular waveguide (WST-AD standard). Two types of line-shaped plasmas are generated; one being a cavity type and the other a slit type. The cavity type line-shaped plasma has a quartz tube in the waveguide as a discharge tube and helium gas is supplied into the quartz tube through orifices of the waveguide. The slit type line-shaped plasma has a slit on its side. A quartz tube as a discharge tube is set beside the slit and helium gas is supplied into it. Electric field intensity and optical emission intensity are then measured. Uniform line-shaped plasmas are generated by varying the width of the waveguide and the microwave power in both types of line-shaped plasmas.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-04-15
著者
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FUKASAWA Takayuki
Department of Electrical Engineering, Hiroshima University
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Fujii Syuitsu
Adtec Co. Ltd.
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Shindo Haruo
Department Of Applied Physics
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Shindo Haruo
Department of Electronics, Tokai University, 1117 Kitakaname, Hiratsuka 259-1259, Japan
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Fukasawa Takayuki
Department of Electronics, Tokai University, 1117 Kitakaname, Hiratsuka 259-1259, Japan
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Fujii Syuitsu
ADTEC Co., Ltd., 5-6-10 Hikinocyo, Fukuyama 721-0942, Japan
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