Etching Reactivity of Negative Ions Generated in Cl_2 Downstream Plasma

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-03-15

著者

• 堀池 靖浩

  物質･材料研究機構

• Shindo Haruo

  Department Of Applied Physics Tokai University

• HORIIKE Yasuhiro

  Department of Electrical Engineering, Toyo University

• ICHIKI Takanori

  Department of Electrical & Electronics Engineering, Toyo University

• Horiike Yasuhiro

  Faculty Of Engineering Toyo University

• Horiike Yasuhiro

  Toshiba Vlsi Research Center

• Horiike Yasuhiro

  Department Of Materials Science The University Of Tokyo

• Horiike Yasuhiro

  Department Of Electrical & Electronics Engineering Tokyo University

• Horiike Yasuhiro

  Department Of Materials Science University Of Tokyo

• Horiike Yasuhiro

  Department Of Electrical Engineering Hiroshima University

• Takayanagi Satoshi

  Department Of Electrical Engineering Toyo University

• MORIKAWA Yasuhiro

  Department of Electrical Engineering, Toyo University

• SHIBAYAMA Toshikazu

  Department of Electrical Engineering, Toyo University

• ITA Hirotsugu

  Department of Electrical Engineering, Toyo University

• Ichiki Takanori

  Department Of Electrical Engineering Toyo University

• Ichiki Takanori

  Department Of Electric And Electronic Engineering Toyo University

• Horiike Yasuhiro

  Department Of Materials Engineering The University Of Tokyo

• Horiike Yasuhiro

  Department Of Electrical And Electronics Engineering Toyo University:department Of Materials Science

• Horiike Yasuhiro

  Toshiba Research And Development Center Integrated Circuit Laboratory

• Horiike Yasuhiro

  Toyo University

• Ita Hirotsugu

  Department Of Electrical Engineering Toyo University

• Morikawa Yasuhiro

  Department Of Electrical Engineering Toyo University

• Shibayama Toshikazu

  Department Of Electrical Engineering Toyo University

• Shindo Haruo

  Department Of Applied Physics

• Horiike Yasuhiro

  Department Of Electrical & Electronics Engineering Toyo University

• Ichiki Takanori

  Department of Bioengineering, Graduate School of Engineering, The University of Tokyo, Bunkyo, Tokyo 113-8656, Japan

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