A Model for Resolution Dependent Roughness Values Measured by an Optical Profiler for Specific Surfaces
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-06-01
著者
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FURUKAWA Masakazu
Process Equipment Engineering Div., Canon Sales Co., Inc.
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HORIIKE Yasuhiro
Department of Electrical Engineering, Toyo University
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Shingubara Shoso
Department of Electrical Engineering, Hiroshima University
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Furukawa Masakazu
Process Equipment Engineering Div. Cannon Sales Co. Inc.
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