A Study of Capacitively Coupled Plasma Generation in Single-Loop Antennas : Nuclear Science, Plasmas, and Electric Discharges
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-08-15
著者
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Shindo Haruo
Department Of Applied Physics Tokai University
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KUDO DAISUKE
Department of Surgery, Hirosaki University School of Medicine
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Kudo Daisuke
Department Of Electronics Tokai University
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FUJII Syuitsu
ADTEC Co., Ltd.
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Fujii Syuitsu
Adtec Co. Ltd.
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Fujii Syuitsu
Adtec Plasma Technology Co. Ltd.
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Shindo Haruo
Department Of Electronics Tokai University
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Shindo Haruo
Department Of Applied Physics
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Kudo Daisuke
Department of Electronics, Tokai University
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SHINDO Haruo
Department of Electronics, Tokai University
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