Long Line-Shaped Microwave Plasma Generation Employing a Narrow Rectangular Waveguide
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-04-15
著者
-
Shindo Haruo
Department Of Applied Physics Tokai University
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FUKASAWA Takayuki
Department of Electrical Engineering, Hiroshima University
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Shindo Haruo
Department Of Electronics
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FUJII Syuitsu
ADTEC Co., Ltd.
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