Horiike Yasuhiro | National Inst. For Materials Sci. Ibaraki Jpn

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概要

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著作論文

Floating Potential in Negative-Ion-Containing Plasma
A Study on Mechanism of Chemical Mechanical Polishing on Al and Cu Surfaces Employing In-situ Infrared Spectroscopy
In-Situ Observation of Oxygen Exposed Hydrogen Terminated Silicon Surfaces
Selective Processing of Individual Carbon-Nanotubes Using Atomic Force Microscopy Installed in Transmission Electron Microscope
Sheath Width in Negative-Ion-Containing Plasma
Emissive Probe Study of CF_4/H_2 Etching Plasma
Integrated DNA Purification and Detection Device for Diagnosis of Infection Diseases
DNA Size Separation Employing Quartz Nano-Pillars with Different Allocations
Development of Clinical Chips for Home Medical Diagnostics
RF Attenuation Characteristics for In Vivo Wireless Healthcare Chip
in-vivo Wireless Communication System for Bio MEMS Sensors
One-Chip Integration of the Rapid Diagnosis Infectious Disease Chip Based on New Phenomena of DNA Trap and Denature in Nano-Gaps
Damage-Free Flattening Technology of Large Scale Si Wafer Employing Localized SF6/H2 Downstream Plasma
Reactive Ion Beam Etching of SiO_2 and Poly-Si Employing C_2F_6, SiF_4 and BF_3 Gases
Grafting Poly(ethylene glycol) to a Glass Surface via a Photocleavable Linker for Light-induced Cell Micropatterning and Cell Proliferation Control
KrF Excimer Laser Projection Lithography: 0.35μm Minimum Space VLSI Pattern Fabrication by a Tri-Level Resist Process
Gas Residence Time Effects on Plasma Parameters: Comparison between Ar and C4F8
Droplet device for immunoassay detection
Si and SiO_2 Etching Characteristics Using Reactive Ion Etching with CF_4-Cl_2 Gas Mixture
A Portable Biochemical Analysis System Integrated with Microcapillary Electrophoresis and Microplasma Emission Spectroscopy
PREFACE
Application of Photoexcited Reaction to VLSI Process (Special Issue on Opto-Electronics and LSI)
Si and SiO_2 Etching Characteristics by Fluorocarbon Ion Beam
Healthcare Chip Based on Integrated Electrochemical Sensors Used for Clinical Diagnostics of Bun
One-Chip Integration of Rapid Diagnosis Infectious-Disease Chip Based on New Phenomena of DNA Trap and Denature in Nanogaps
Integrated DNA Purification and Detection Device for Diagnosis of Infectious Disease
Fabrication and Characterization of Quartz Nanopillars for DNA Separation by Size

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