HORIIKE Yasuhiro | VLSI Research Center, Toshiba Corporation

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概要

• 同名の論文著者
• VLSI Research Center, Toshiba Corporationの論文著者

関連著者

• HORIIKE Yasuhiro

  VLSI Research Center, Toshiba Corporation

• Horiike Yasuhiro

  Faculty Of Engineering Hiroshima University

• 堀池 靖浩

  広島大工

• Okano H

  Applied Materials Japan Inc. Chiba Jpn

• Sekine M

  Association Of Super-advanced Electronics Technologies (aset):(present Address)process & Manufac

• SEKINE Makoto

  VLSI Research Center, Toshiba Corp.

• OKANO Haruo

  VLSI Research Center, Toshiba Corp.

• Horiike Yasuhiro

  National Inst. For Materials Sci. Ibaraki Jpn

• Horiike Yasuhiro

  Biomaterials Center National Institute For Materials Science

• HIGASHIKAWA Iwao

  ULSI Research Laboratories, Toshiba Corporation

• Yamabe Kikuo

  Vlsi Research Center Toshiba Corp.

• Nakase Makoto

  Vlsi Research Center Toshiba Corporation

• Hayasaka Nobuo

  Vlsi Research Center Toshiba Corp.

• Higashikawa I

  Ulsi Research Laboratories Toshiba Corporation

• SATO Takashi

  VLSI Research Center, Toshiba Corporation

• NONAKA Misako

  VLSI Research Center, Toshiba Corporation

• HIGASHIKAWA Iwao

  VLSI Research Center, Toshiba Corporation

• Nonaka Misako

  Vlsi Research Center Toshiba Corporation

• Horiike Yasuhiro

  Development Of Material Science School Of Engineering University Of Tokyo

• Horiike Yasuhiro

  World Premier International (wpi) Research Center Initiative International Center For Materials Nano

• 佐藤 隆

  (株)東芝セミコンダクター社

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著作論文

• KrF Excimer Laser Projection Lithography: 0.35μm Minimum Space VLSI Pattern Fabrication by a Tri-Level Resist Process
• Radiation Damage Evaluation in Excimer Laser Beam Irradiation and Reactive Ion Etching
• Excimer Laser Photochemical Directional Etching of Phosphorous Doped Poly-Crystalline Silicon

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