Transmission Electron Microscope Observation of Grown-in Defects Detected by Bright-Field Infrared-Laser Interferometer in Czochralski Silicon Crystals
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概要
- 論文の詳細を見る
- 1998-02-15
著者
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NAKAI Katsuhiko
Advanced Technology Research Laboratories, Nippon Steel Corporation
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OHASHI Wataru
Advanced Technology Research Laboratories, Nippon Steel Corporation
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Fujinami Masanori
Advanced Materials And Technology Research Laboratories Nippon Steel Corporation
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Fujinami Masanori
Advanced Technology Research Laboratories Nippon Steel Corporation
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IKEMATSU Yoichi
Advanced Technology Laboratories, Nippon Steel Corp.
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Ohashi W
Nippon Steel Corp. Chiba Jpn
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Ohashi Wataru
Advanced Technology Research Laboratories Nippon Steel Corporation
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MIZUTANI Toshiyuki
Advanced Technology Research Laboratories, Nippon Steel Corporation
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HASEBE Masami
Advanced Technology Research Laboratories, Nippon Steel Corporation
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Hasebe Masami
Advanced Technology Research Laboratories Nippon Steel Corporation
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Mizutani T
Advanced Technology Research Laboratories Nippon Steel Corporation
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Nakai Katsuhiko
Advanced Technology Research Laboratories Nippon Steel Corporation
関連論文
- Microvoid Defects in Nitrogen- and/or Carbon-doped Czochralski-grown Silicon Crystals
- Current-Path Observation in Low-Dose SIMOX (Separation by Implanted Oxygen) Buried-SiO_2 Layer
- Transmission Electron Microscope Observation of Grown-in Defects Detected by Bright-Field Infrared-Laser Interferometer in Czochralski Silicon Crystals
- Improvement of Threshold Voltage Uniformity in Ion-Implanted GaAs-Metal-Semiconductor Field-Effect Transistors on Si
- Influence of Crystal Originated Particles on Gate Oxide Breakdown
- Role of TiAl_3 Fine Precipitate in Nucleation of the Primary Al Dendrite Phase during Solidification in Hot-Dip Zn-11%Al-3%Mg-0.2%Si Coated Steel Sheet
- Analysis of Basal Plane Bending and Basal Plane Dislocations in 4H-SiC Single Crystals
- Alloying Reaction of Aluminized Steel Sheet
- Positron Annihilation in Neutron- and Electron-Irradiated Silica Glass
- Microvoid Defects in Nitrogen- and/or Carbon-doped Czochralski-grown Silicon Crystals