Preparation of YBa2Cu3O7-δ Micropatterns Using Metal–Organic Deposition with Electron Beam
スポンサーリンク
概要
- 論文の詳細を見る
We investigated microfabrication using the metal–organic deposition (MOD) process with an electron beam. Metal naphthenates in the irradiated area remained after development, which indicates negative exposure characteristics. The optimized electron dose was estimated to be 3400 μC/cm2. Drawn patterns shrink after heat treatment because of the vaporation of organic components. A fine line with a width of 90 nm was successfully obtained after heat treatment. Numerous voids were observed on the surface of the large patterned film, compared with unirradiated films. Electron beam irradiation decomposed metal naphthenates, and cohesion was promoted by the annealing process. The optimization of the annealing profile is required to prepare uniform micropatterns.
- 2010-08-25
著者
-
YAMAGUCHI Iwao
National Institute of Advanced Industrial Science and Technology (AIST)
-
TSUKADA Kenichi
National Institute of Advanced Industrial Science and Technology (AIST)
-
Manago Takashi
Tokyo Univ. Sci. Yamaguchi Jpn
-
Yamaguchi Iwao
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan
-
Tanabe Daiji
Tokyo University of Science, Yamaguchi, Sanyo-Onoda, Yamaguchi 756-0884, Japan
-
Manago Takashi
Tokyo University of Science, Yamaguchi, Sanyo-Onoda, Yamaguchi 756-0884, Japan
関連論文
- Epitaxial growth of La_Ba_MnO_3 thin films on SrTiO_3 and LaAlO_3 substrates by metal-organic deposition process
- Preparation of Double-Sided YBCO Films on LaAlO_3 by MOD Using Commercially Available Coating Solution( Superconducting High-frequency Devices)
- Fabrication of Double-Sided YBa_2Cu_3O_7 Films on CeO_2-Buffered Sapphire Substrates by MOD Process( Superconducting High-frequency Devices)
- Electrical Properties of La_Ca_MnO_3 Thin Films Obtained by Metal-Organic Deposition (MOD) using Excimer Laser and Thermal Annealing
- Preparation of High-J_c YBa_2 Cu_3O_ Films on CeO_2-Buffered Yttria-Stabilized Zirconia Substrates by Fluorine-Free Metalorganic Deposition
- Large Temperature Coefficient of Resistance in La_Ca_MnO_3 Thin Films Obtained by Metal Organic Deposition Process
- Low Temperature Growth of Epitaxial La_Sr_MnO_3 Thin Films by an Excimer-Laser-Assisted Coating Pyrolysis Process
- Preparation of Epitaxial YBa_2Cu_3O_/CeO_2 Multilayer Films on Yttria-stabilized Zirconia (100) by All-Coating-Pyrolysis Process : Superconductors
- Preparation of PbTiO_3 Thin Films Using a Coating Photolysis Process with ArF Excimer Laser
- X-Ray Diffraction Studies of Epitaxial La_Sr_CoO_3 Thin Films Prepared by the Dipping-Pyrolysis Process
- Direct Conversion of Metal Acetylacetonates and Metal Organic Acid Salts into Metal Oxides Thin Films Using Coating Photolysis Process with An ArF Excimer Laser
- Direct Conversion of Titanium Alkoxide into Crystallized TiO_2 (rutile) Using Coating Photolysis Process with ArF Excimer Laser
- Epitaxial Growth of Bi_4Ti_3O_ Thin Films on LaAlO_3 (012) and MgO (100) by Dipping-Pyrolysis Process
- Preparation of Epitaxial Pb(Zr, Ti)O_3 Thin Films on Nb-Doped SrTiO_3(100) Substrates by Dipping-Pyrolysis Process
- Effect of Ion Implantations and Post-treatments on Optical Transmission of Fluorozirconate Glass
- Polarization Properties in Phase Conjugation with Bacteriorhodopsin
- Optical Characterization of Ion-Implanted Glass Surface Layers with Surface Plasmon Resonance Method
- Fusion of Paramecia by Means of Altered Electrofusion
- Preparation of YBa2Cu3O7-δ Micropatterns Using Metal–Organic Deposition with Electron Beam
- Epitaxial Growth of La0.7Ba0.3MnO3 Thin Films on SrTiO3 and LaAlO3 Substrates by Metal-Organic Deposition
- Electrical Properties of La0.7Ca0.3MnO3 Thin Films Obtained by Metal-Organic Deposition (MOD) using Excimer Laser and Thermal Annealing
- Preparation and Characterization of Epitaxial VO2 Films on Sapphire Using Postepitaxial Topotaxy Route via Epitaxial V2O3 Films
- Preparation of High-$J_{\text{c}}$ YBa2Cu3O7-y Films on CeO2-Buffered Yttria-Stabilized Zirconia Substrates by Fluorine-Free Metalorganic Deposition