Selective-Area Growth of Thick Diamond Films Using Chemically Stable Masks of Ru/Au and Mo/Au
スポンサーリンク
概要
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Selective-area growth of diamond films in microwave-plasma chemical vapor deposition was performed using newly developed masks. By forming chemically stable masks made of Ru/Au or Mo/Au, which have high melting points, good adhesion to diamond, and difficulty in forming carbide compounds, patterned diamond films with a large thickness of 50 μm, a large area of 5 mm2, and a high orientation in the [001] direction were successfully grown on (001) diamond substrates without degradation of the crystal quality of masked areas.
- 2012-07-25
著者
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Umezawa Hitoshi
Diamond Research Center Aist
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Shikata Shinichi
Diamond Research Center Advanced Industrial Science And Technology
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Nagase Masanori
Diamond Research Laboratory, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Watanabe Katsumi
Diamond Research Laboratory, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Shikata Shinichi
Diamond Research Laboratory, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Umezawa Hitoshi
Diamond Res. Lab, National Inst. of Advanced Industrial Sci.
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Shikata Shinichi
Diamond Res. Lab, National Inst. of Advanced Industrial Sci.
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