Effect of Ion-Irradiation on Silieide Formation in Metal-Silicon System with Interfacial Silicon Dioxide Layer
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1985-09-20
著者
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ITOH Noriaki
Department of Physics, Faculty of Science, Nagoya University
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HORINO Yuji
Department of Materials Physics, Osaka National Research Institute
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Itoh Noriaki
Department Of Crystalline Materials Science Faculty Of Engineering Nagoya University
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MATSUNAMI Noriaki
Department of Crystalline Materials Science, Faculty of Engineering, Nagoya University
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Horino Yuji
Department Of Crystalline Materials Science Faculty Of Engineering Nagoya University
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Matsunami N
Nagoya Univ. Nagoya Jpn
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Itoh Noriaki
Department Of Crystalline Material Science Faculty Of Engineering Nagoya University
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