Fabrication of Submicron Contact Hole with a Focused Ion Beam
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-07-20
著者
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Namba S
Inst. Physical And Chemical Research Wako
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Namba Susumu
Faculty Of Engineering Science Osaka University
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Namba Susumu
Faculty Of Engineering Science And Research Center For Extreme Materials Osaka University
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Namba Susumu
Nagasaki Institute Of Applied Science
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GAMO Kenji
Faculty of Engineering Science, Osaka University
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Yasuoka Yoshizumi
Department of Electronic Engineering, The National Defense Academy
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HARAKAWA Kenichi
Department of Electronic Engineering, The National Defense Academy
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Harakawa K
Takenaka Corp. Inzai Jpn
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Yasuoka Y
National Defense Acad. Yokosuka‐shi Jpn
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Yasuoka Yoshizumi
Department Of Electrical And Electronic Engineering National Defense Academy
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Gamo Kenji
Faculty Of Engineering Science And Research Center For Extreme Materials Osaka University
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Namba Susumu
Frontier Research Program Riken
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Nagatomo S
Shizuoka Univ. Shizuoka Jpn
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Namba Susumu
Faculty Of Engineering Science And Research Center For Extreme Materials (rcem) Osaka University
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