EBE Akinori | EMD Corp.

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著作論文

Large-Area and High-Speed Deposition of Microcrystalline Silicon Film by Inductive Coupled Plasma using Internal Low-Inductance Antenna
Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Units
Effects of Antenna Size and Configurations in Large-Area RF Plasma Production with Internal Low-Inductance Antenna Units
Characterization of Ion Energy Distribution in Inductively Coupled Argon Plasmas Sustained with Multiple Internal-Antenna Units
Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Units
Plasma-Enhanced Reactive Magnetron Sputtering Assisted with Inductively Coupled Plasma for Reactivity-Controlled Deposition of Microcrystalline Silicon Thin Films

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