Characterization of Ion Energy Distribution in Inductively Coupled Argon Plasmas Sustained with Multiple Internal-Antenna Units
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概要
- 論文の詳細を見る
We have characterized the ion energy distribution in argon plasmas sustained by multiple internal antenna units as a function of Ar pressure. The distribution has been measured using an ion energy analyzer with a mass separator. The peak of ion energy distribution depended more strongly on pressure and corresponded to the magnitude of plasma potential. The full width at half maximum of the distributions decreased with decreasing antenna RF voltage caused by a decrease in Ar pressure.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-08-25
著者
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EBE Akinori
EMD Corp.
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NISHISAKA Kazuaki
EMD Corporation
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Setsuhara Yuichi
Joining And Welding Research Institute Osaka University
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Takenaka Kosuke
Joining And Welding Research Institute Osaka University
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Ebe Akinori
EMD Corporation, Kyoto 615-8245, Japan
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