Combinatorial Analysis of Plasma–Surface Interactions of Poly(ethylene terephthalate) with X-ray Photoelectron Spectroscopy
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概要
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Combinatorial analysis has been demonstrated for the examination of plasma–surface interactions of poly(ethylene terephthalate) (PET) in terms of chemical bonding state, with X-ray photoelectron spectroscopy (XPS). The chemical bonding states have been investigated for PET films exposed to an argon–oxygen mixture plasma with a density gradient sustained with RF power of 88, 175, and 350 W. The XPS results obtained from three batches of experiments showed a slight increase in the bond peaks caused by the oxidation of which PET with an increase in the product of (ion saturation current) $\times$ (plasma exposure time), corresponds to ion dose.
- 2010-08-25
著者
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Hori Masaru
Graduate School Of Engineering Nagoya University
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Shiratani Masaharu
Department Of Electoronics Kyushu University
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Setsuhara Yuichi
Joining And Welding Research Institute Osaka University
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Takenaka Kosuke
Joining And Welding Research Institute Osaka University
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Sekine Makoto
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Cho Ken
Joining and Welding Research Institute, Osaka University, Ibaraki, Osaka 567-0047, Japan
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Shiratani Masaharu
Department of Electronics, Kyushu University, Fukuoka 819-0395, Japan
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Takenaka Kosuke
Joining and Welding Research Institute, Osaka University, Ibaraki, Osaka 567-0047, Japan
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