Hori Masaru | Graduate School Of Engineering Nagoya University
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概要
関連著者
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Hori Masaru
Graduate School Of Engineering Nagoya University
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Takeda Keigo
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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KONDO Hiroki
Graduate School of Engineering, Nagoya University
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Ishikawa Kenji
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Sekine Makoto
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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KANO Hiroyuki
NU Eco-Engineering Co., Ltd.
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Toyoda Hirotaka
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Kano Hiroyuki
NU Eco Engineering Co., Ltd., Miyoshi, Aichi 470-0201, Japan
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OHTA Takayuki
Faculty of Systems Engineering, Wakayama University
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Itoh Hitoshi
Technology Development Center Tokyo Electron Ltd.
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Yamakawa Koji
Katagiri Engineering Co. Ltd.
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Takashima Seigo
Plasma Center for Industrial Applications, Nagoya Urban Industries Promotion Corporation, 2268-1 Anagahora, Shimoshidami, Moriyama-ku, Nagoya 463-0003, Japan
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Inoue Mari
Graduate School of Systems Engineering, Wakayama University, Wakayama 640-8510, Japan
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Takota Naoki
Graduate School of Systems Engineering, Wakayama University, Wakayama 640-8510, Japan
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Tsuchitani Shigeki
Faculty of Systems Engineering, Wakayama University, Wakayama 640-8510, Japan
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Ito Masafumi
Faculty of Science and Technology, Meijo University, Nagoya 468-8502, Japan
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Takashima Seigo
Plasma Center for Industrial Applications, Nagoya Industries Promotion Corporation, Nagoya 463-0003, Japan
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Ohta Takayuki
Faculty of Science and Technology, Meijo University, Nagoya 468-8502, Japan
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Hori Masaru
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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INOUE Mari
Graduate School of Human Development and Environment, Kobe University
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Kubota Yusuke
Technology Development Center, Tokyo Electron Ltd., Tsukuba, Ibaraki 305-0841, Japan
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Kashiwagi Yusaku
Technology Development Center, Tokyo Electron Ltd., Tsukuba, Ibaraki 305-0841, Japan
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Kometani Ryosuke
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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SAMUKAWA Seiji
Institute of Fluid Science, Tohoku University
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堀 勝
名古屋大学大学院工学研究科電子情報システム専攻
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Goto T
Graduate School Of Pharmaceutical Sciences Tohoku University
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Goto Takaaki
Department Of Electric Engineering Tokyo University Of Agriculture And Technology
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Samukawa S
Tohoku Univ. Sendai Jpn
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Samukawa Seiji
Institute Of Fluid Science Tohoku University
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Samukawa Seiji
Process Development Department Vlsi Development Division Nec Corporation
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Samukawa Seiji
Vlsi Development Div. Nec Corporation
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Hori Masaru
School Of Engineering Nagoya University
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ITO Haruhiko
Graduate School of Engineering, Nagoya University
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KANO Hiroyuki
Graduate School of Engineering, Nagoya University
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Ito Haruhiko
Graduate School Of Engineering Nagoya University
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Murata Kazuya
Graduate School Of Science Osaka City University
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Shiratani Masaharu
Department Of Electoronics Kyushu University
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Kano Hiroyuki
Graduate School Of Engineering Nagoya University
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TADA Shigekazu
Department of Quantum Engineering, Nagoya University
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Den Shoji
Katagiri Engineering Co. Ltd.
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Tsukada T
Tdk Corp. Chiba Jpn
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MIZUTANI Yuko
Graduate School of Engineering, Nagoya University
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IWASAKA Emi
Graduate School of Engineering, Nagoya University
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TAKASHIMA Seigou
Graduate School of Engineering, Nagoya University
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GOTO Toshio
Graduate School of Engineering, Nagoya University
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TSUKADA Tsutomu
Semiconductor Equipment Division, Anelva Corporation
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Sakakibara T
Department Of Quantum Engineering Nagoya University
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後藤 俊夫
Imram Tohoku University
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Murata Kazuya
Graduate School Of Engineering Nagoya University
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Setsuhara Yuichi
Joining And Welding Research Institute Osaka University
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Iwasaka Emi
Graduate School Of Engineering Nagoya University
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Mizutani Yuko
Graduate School Of Engineering Nagoya University
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Takenaka Kosuke
Joining And Welding Research Institute Osaka University
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Kondo Hiroki
Department Of Electrical Engineering And Computer Science Nagoya University
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Ito Masafumi
Faculty Of System Eng. Wakayama University
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Goto Toshio
Graduate School Of Engineering Nagoya University
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Chen Shang
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Cho Ken
Joining and Welding Research Institute, Osaka University, Ibaraki, Osaka 567-0047, Japan
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Kang Song-Yun
Corporate Development Division, Tokyo Electron Ltd., Nirasaki, Yamanashi 407-0192, Japan
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Shiratani Masaharu
Department of Electronics, Kyushu University, Fukuoka 819-0395, Japan
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Sawada Ikuo
Corporate Development Division, Tokyo Electron Ltd., Nirasaki, Yamanashi 407-0192, Japan
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Takeuchi Takuya
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Amasaki Shinpei
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Takenaka Kosuke
Joining and Welding Research Institute, Osaka University, Ibaraki, Osaka 567-0047, Japan
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Kondo Hiroki
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Ito Azumi
Research & Development Center, ZEON Corporation, Kawasaki 210-9507, Japan
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Hayashi Toshio
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Miyawaki Yudai
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Kondo Yusuke
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Yamazaki Atsuyo
Research & Development Center, ZEON Corporation, Kawasaki 210-9507, Japan
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Matsumoto Hirokazu
Research & Development Center, ZEON Corporation, Kawasaki 210-9507, Japan
著作論文
- New Compact Continuous Spectrum Light Source Using Atmospheric Pressure Microplasma with High-Velocity Ar Gas Flow
- Growth of Preferentially Oriented Microcrystalline Silicon Film Using Pulse-Modulated Ultrahigh-Frequency Plasma
- Behaviors of Absolute Densities of N, H, and NH3 at Remote Region of High-Density Radical Source Employing N2--H2 Mixture Plasmas
- Combinatorial Analysis of Plasma–Surface Interactions of Poly(ethylene terephthalate) with X-ray Photoelectron Spectroscopy
- Impacts of CF+, CF2+, CF3+, and Ar Ion Beam Bombardment with Energies of 100 and 400 eV on Surface Modification of Photoresist
- Line-Profiles and Translational Temperatures of Pb Atoms in Multi-Micro Hollow Cathode Lamp Measured by Diode Laser Absorption Spectroscopy
- Properties of Indium--Zinc-Oxide Films Synthesized by Radio Frequency Magnetron Sputtering Based on Gas Phase Monitoring Using Multi-Micro Hollow Cathode Lamp
- Highly Selective Etching of SiO2 over Si3N4 and Si in Capacitively Coupled Plasma Employing C5HF7 Gas
- A High-Temperature Nitrogen Plasma Etching for Preserving Smooth and Stoichiometric GaN Surface
- High H Radical Density Produced by 1-m-Long Atmospheric Pressure Microwave Plasma System
- High H Radical Density Produced by 1-m-Long Atmospheric Pressure Microwave Plasma System (Special Issue : Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials)
- A High-Temperature Nitrogen Plasma Etching for Preserving Smooth and Stoichiometric GaN Surface